Absolute wavelength scanning interferometry for measuring the thickness of optical elements

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61389021%3A_____%2F23%3A00583091" target="_blank" >RIV/61389021:_____/23:00583091 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/46747885:24220/23:00010952

Výsledek na webu

<a href="https://opg.optica.org/oe/fulltext.cfm?uri=oe-31-3-3565&id=525241" target="_blank" >https://opg.optica.org/oe/fulltext.cfm?uri=oe-31-3-3565&id=525241</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1364/OE.479211" target="_blank" >10.1364/OE.479211</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Absolute wavelength scanning interferometry for measuring the thickness of optical elements

Popis výsledku v původním jazyce

A technique for measurement of the thickness of optical elements using absolute wavelength scanning interferometry is presented in this paper. To achieve high-grade optical components and systems, the thickness of both planar and non-planar optical components must be measured with an accuracy of a few micrometers. The proposed technique is based on the Fizeau interferometer and interconnects data from three different tunable laser diodes yielding a long effective wavelength range and thus low measurement uncertainty. The uncertainty of the central thickness measurement ranges from hundreds of nanometers to a few microns. The method allows to measure the thickness of both flat optical elements as well as lenses with curved surfaces. Moreover, the areal information provided by the interferometry and its high angle sensitivity help to quickly and precisely align the measured component and reduce misalignment errors. The results of thickness measurements have been validated and cross-tested with other techniques. In addition to the thickness, the technique provides some additional information (wedge, surface form error) in the case of flat samples and can be easily and quickly modified (mounting of a Fizeau transmission sphere) to measure other essential parameters of optical elements. Thus, this one approach can replace many single-purpose measuring devices while maintaining high accuracy.

Název v anglickém jazyce

Absolute wavelength scanning interferometry for measuring the thickness of optical elements

Popis výsledku anglicky

A technique for measurement of the thickness of optical elements using absolute wavelength scanning interferometry is presented in this paper. To achieve high-grade optical components and systems, the thickness of both planar and non-planar optical components must be measured with an accuracy of a few micrometers. The proposed technique is based on the Fizeau interferometer and interconnects data from three different tunable laser diodes yielding a long effective wavelength range and thus low measurement uncertainty. The uncertainty of the central thickness measurement ranges from hundreds of nanometers to a few microns. The method allows to measure the thickness of both flat optical elements as well as lenses with curved surfaces. Moreover, the areal information provided by the interferometry and its high angle sensitivity help to quickly and precisely align the measured component and reduce misalignment errors. The results of thickness measurements have been validated and cross-tested with other techniques. In addition to the thickness, the technique provides some additional information (wedge, surface form error) in the case of flat samples and can be easily and quickly modified (mounting of a Fizeau transmission sphere) to measure other essential parameters of optical elements. Thus, this one approach can replace many single-purpose measuring devices while maintaining high accuracy.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

10306 - Optics (including laser optics and quantum optics)

Projekt

<a href="/cs/project/EF16_026%2F0008390" target="_blank" >EF16_026/0008390: Partnerství pro excelenci v superpřesné optice</a><br>

Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2023

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Optics Express

ISSN

1094-4087

e-ISSN

—

Svazek periodika

31

Číslo periodika v rámci svazku

3

Stát vydavatele periodika

US - Spojené státy americké

Počet stran výsledku

14

Strana od-do

3565-3578

Kód UT WoS článku

000934904400007

EID výsledku v databázi Scopus

2-s2.0-85147729883