Measurement of the shape of objects by two wavelength interferometry

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61989592%3A15310%2F13%3A33146184" target="_blank" >RIV/61989592:15310/13:33146184 - isvavai.cz</a>

Výsledek na webu

<a href="http://dx.doi.org/10.1117/12.2019001" target="_blank" >http://dx.doi.org/10.1117/12.2019001</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1117/12.2019001" target="_blank" >10.1117/12.2019001</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Measurement of the shape of objects by two wavelength interferometry

Popis výsledku v původním jazyce

We propose a fast and precise optical 3D measurement method. The principle is similar to that of white-light interferometry. The broad-band light source of white-light interferometry is replaced by two lasers with different wavelengths. The object to bemeasured is placed into one arm of a Michelson interferometer and moved along the optical axis. The intensity measured at the output of the interferometer is equal to the field autocorrelation. In the case of two wavelengths, the autocorrelation is a periodical function with peaks as a result of their beating. The period can be adjusted by the choice of the wavelength difference. By choosing a short period, a fast and precise measurement is performed in the range of a single beat. However, such a measurement is ambiguous if the object has structures deeper than the beat period. The ambiguity is removed by a fast auxiliary measurement with a long beat period covering the whole depth range of the object. The auxiliary measurement need not

Název v anglickém jazyce

Measurement of the shape of objects by two wavelength interferometry

Popis výsledku anglicky

We propose a fast and precise optical 3D measurement method. The principle is similar to that of white-light interferometry. The broad-band light source of white-light interferometry is replaced by two lasers with different wavelengths. The object to bemeasured is placed into one arm of a Michelson interferometer and moved along the optical axis. The intensity measured at the output of the interferometer is equal to the field autocorrelation. In the case of two wavelengths, the autocorrelation is a periodical function with peaks as a result of their beating. The period can be adjusted by the choice of the wavelength difference. By choosing a short period, a fast and precise measurement is performed in the range of a single beat. However, such a measurement is ambiguous if the object has structures deeper than the beat period. The ambiguity is removed by a fast auxiliary measurement with a long beat period covering the whole depth range of the object. The auxiliary measurement need not

Druh

D - Stať ve sborníku

CEP obor

BH - Optika, masery a lasery

OECD FORD obor

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Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2013

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN)

ISBN

978-0-8194-9567-9

ISSN

0277-786X

e-ISSN

—

Počet stran výsledku

6

Strana od-do

"87690H-1"-"87690H-6"

Název nakladatele

SPIE

Místo vydání

Bellingham (OR)

Místo konání akce

Singapore

Datum konání akce

9. 4. 2013

Typ akce podle státní příslušnosti

WRD - Celosvětová akce

Kód UT WoS článku

000323566900017