Formation of metastable zirconium oxides using pulsed laser deposition of ZrO based target

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F67985831%3A_____%2F19%3A00511402" target="_blank" >RIV/67985831:_____/19:00511402 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/67985858:_____/19:00511402

Výsledek na webu

<a href="https://iopscience.iop.org/article/10.1088/1757-899X/613/1/012016/pdf" target="_blank" >https://iopscience.iop.org/article/10.1088/1757-899X/613/1/012016/pdf</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1088/1757-899X/613/1/012016" target="_blank" >10.1088/1757-899X/613/1/012016</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Formation of metastable zirconium oxides using pulsed laser deposition of ZrO based target

Popis výsledku v původním jazyce

There is a growing interest about the possibilities for preparation of various zirconium oxides from scientific as well as application point of view. Laser ablation of solid target consisting of sintered grains of metallic hexagonal Zr3O and monoclinic ZrO2 results in evaporation of Zr, O species (ions, atoms) and subsequent deposition of Zr-O film. Ta and Cu have been used as substrates. The films were analyzed by SEM-EDX, Raman and FTIR spectroscopy and X-ray diffraction. SEM analysis revealed µm/sub-µm sized roundshape and ring-like objects on continuous coat. Using Raman spectroscopy broad peaks which can suggest partial laser induced amorphization of Zr-O deposits were detected. FTIR spectroscopy shows bands which are assignable to Zr-O vibration of nanostructured zirconia. X-ray diffraction analysis provides more explicit assignment of deposited phases where the deposit on Ta exhibits presence of monoclinic ZrO2, oxygen deficient rhombohedric Zr3O and interestingly indicates presence of high-pressure orthorhombic ZrO2 phase. The coat on Cu consists of monoclinic ZrO2, rhombohedric Zr3O, and metastable tetragonal ZrO2 phase.

Název v anglickém jazyce

Formation of metastable zirconium oxides using pulsed laser deposition of ZrO based target

Popis výsledku anglicky

There is a growing interest about the possibilities for preparation of various zirconium oxides from scientific as well as application point of view. Laser ablation of solid target consisting of sintered grains of metallic hexagonal Zr3O and monoclinic ZrO2 results in evaporation of Zr, O species (ions, atoms) and subsequent deposition of Zr-O film. Ta and Cu have been used as substrates. The films were analyzed by SEM-EDX, Raman and FTIR spectroscopy and X-ray diffraction. SEM analysis revealed µm/sub-µm sized roundshape and ring-like objects on continuous coat. Using Raman spectroscopy broad peaks which can suggest partial laser induced amorphization of Zr-O deposits were detected. FTIR spectroscopy shows bands which are assignable to Zr-O vibration of nanostructured zirconia. X-ray diffraction analysis provides more explicit assignment of deposited phases where the deposit on Ta exhibits presence of monoclinic ZrO2, oxygen deficient rhombohedric Zr3O and interestingly indicates presence of high-pressure orthorhombic ZrO2 phase. The coat on Cu consists of monoclinic ZrO2, rhombohedric Zr3O, and metastable tetragonal ZrO2 phase.

Druh

J_SC - Článek v periodiku v databázi SCOPUS

CEP obor

—

OECD FORD obor

10305 - Fluids and plasma physics (including surface physics)

Projekt

—

Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2019

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

IOP Conference Series: Materials Science and Engineering

ISSN

1757-8981

e-ISSN

—

Svazek periodika

613

Číslo periodika v rámci svazku

1

Stát vydavatele periodika

GB - Spojené království Velké Británie a Severního Irska

Počet stran výsledku

7

Strana od-do

012016

Kód UT WoS článku

—

EID výsledku v databázi Scopus

2-s2.0-85075110894