Semiconductor laser sources at 760 nm wavelength for nanometrology

Kód výsledku v IS VaVaI

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Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Semiconductor laser sources at 760 nm wavelength for nanometrology

Popis výsledku v původním jazyce

Measurement with nanometer resolution is required for the next advance in nanotechnology. Especially the noncontacting methods of measurement are very .promising. We present the set-up of the laser interferometer with nanometer resolution. A stabilized laser source with the DFB (Distributed FeedBack) laser diode was developed and its realization was implemented to the laser interferometer. The output of the DFB laser source and the design of optical set-up of the laser interferometer are realized by fiber optics. It will improve repeatability of measuring by reducing the influence of the index of refraction of air. The measurement probe is realized by standard optical fiber with reflection coated optical connector. Due to using of the DFB laser sourceit is possible to measure of the length in incremental or absolute regime. The stability and the tunability of the wavelength of the laser source are crucial parameters to improve resolution and accuracy of the laser interferometer.

Název v anglickém jazyce

Semiconductor laser sources at 760 nm wavelength for nanometrology

Popis výsledku anglicky

Measurement with nanometer resolution is required for the next advance in nanotechnology. Especially the noncontacting methods of measurement are very .promising. We present the set-up of the laser interferometer with nanometer resolution. A stabilized laser source with the DFB (Distributed FeedBack) laser diode was developed and its realization was implemented to the laser interferometer. The output of the DFB laser source and the design of optical set-up of the laser interferometer are realized by fiber optics. It will improve repeatability of measuring by reducing the influence of the index of refraction of air. The measurement probe is realized by standard optical fiber with reflection coated optical connector. Due to using of the DFB laser sourceit is possible to measure of the length in incremental or absolute regime. The stability and the tunability of the wavelength of the laser source are crucial parameters to improve resolution and accuracy of the laser interferometer.

Druh

D - Stať ve sborníku

CEP obor

BH - Optika, masery a lasery

OECD FORD obor

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Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

Z - Vyzkumny zamer (s odkazem do CEZ)

Rok uplatnění

2010

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

Proceedings of the 9th WSEAS International Conference on Microelectronics, Nanoelectronics, Optoelectronic

ISBN

978-954-92600-3-8

ISSN

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e-ISSN

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Počet stran výsledku

6

Strana od-do

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Název nakladatele

WSEAS EUROPMENT Press

Místo vydání

Sofia

Místo konání akce

Catania

Datum konání akce

29. 5. 2010

Typ akce podle státní příslušnosti

WRD - Celosvětová akce

Kód UT WoS článku

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