Interferometry with suppression of fast fluctuations of the refractive index of air for nanometrology

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F13%3A00398400" target="_blank" >RIV/68081731:_____/13:00398400 - isvavai.cz</a>

Výsledek na webu

<a href="http://dx.doi.org/10.1117/12.2035553" target="_blank" >http://dx.doi.org/10.1117/12.2035553</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1117/12.2035553" target="_blank" >10.1117/12.2035553</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Interferometry with suppression of fast fluctuations of the refractive index of air for nanometrology

Popis výsledku v původním jazyce

We present an interferometric technique based on differential interferometry setup for measurement in the subnanometer scale in atmospheric conditions. The motivation for development of this ultraprecise technique is coming from the field of nanometrology. The key limiting factor in any optical measurement are fluctuations of the refractive index of air representing the greatest source of uncertainty. Our proposal is based on the concept of combining overdetermined interferometric setup where a reference wavelength is derived from a mechanical reference for compensation of fast fluctuations and traditional indirect evaluation of the refractive index compensating on the other hand the long-term drift of the mechanical reference caused by thermal expansion. The technique allows to track the variations of the refractive index of air on-line directly in the line of the measuring beam and to compensate for the fluctuations. The optical setup consists of three interferometers sharing the sam

Název v anglickém jazyce

Interferometry with suppression of fast fluctuations of the refractive index of air for nanometrology

Popis výsledku anglicky

We present an interferometric technique based on differential interferometry setup for measurement in the subnanometer scale in atmospheric conditions. The motivation for development of this ultraprecise technique is coming from the field of nanometrology. The key limiting factor in any optical measurement are fluctuations of the refractive index of air representing the greatest source of uncertainty. Our proposal is based on the concept of combining overdetermined interferometric setup where a reference wavelength is derived from a mechanical reference for compensation of fast fluctuations and traditional indirect evaluation of the refractive index compensating on the other hand the long-term drift of the mechanical reference caused by thermal expansion. The technique allows to track the variations of the refractive index of air on-line directly in the line of the measuring beam and to compensate for the fluctuations. The optical setup consists of three interferometers sharing the sam

Druh

D - Stať ve sborníku

CEP obor

BH - Optika, masery a lasery

OECD FORD obor

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Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2013

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

Sixth International Symposium on Precision Mechanical Measurements (Proceedings of SPIE 8916)

ISBN

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ISSN

0277-786X

e-ISSN

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Počet stran výsledku

6

Strana od-do

"89161J: 1"-"6"

Název nakladatele

SPIE

Místo vydání

Bellingham

Místo konání akce

Guiyang

Datum konání akce

10. 10. 2013

Typ akce podle státní příslušnosti

WRD - Celosvětová akce

Kód UT WoS článku

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