Correction of misalignment aberrations of a hexapole corrector using the differential algebra method

Kód výsledku v IS VaVaI

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Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Correction of misalignment aberrations of a hexapole corrector using the differential algebra method

Popis výsledku v původním jazyce

Overcoming the limitations of the Schertzer theorem is a long story in electron microscopy. Although the basic principle of a spherical aberration (C3) correction was suggested as early as in 1947 the first experimental correctors of spherical aberration were only realized in the last decade of the 20th century. The recent multipole correctors are designed for high-energynTEM or STEM, where the corrector system enables reaching the atomic resolution. On the othernhand, the corrector for low-energy SEM has been developed but this type of corrector must also contain chromatic aberration (Cc) correction to reduce the effect of the non-zero energy width. Recently, the energies of SEM reach 30 keV and transmission mode (TSEM) is a standard part of the instrument. Standard resolution in TSEM is about 0.6 nm and it is limited by C3. Reaching atomic resolution with this set-up is not a real expectation because of its instability, but the resolution of about 0.2 nm would increase the field of applications. Corrector for these type of instruments should be (a) simple, compact and cheap (b) only spherical aberration of the third,noptionally the fifth order must be corrected (c) effect of the chromatic aberration may be reduced by energy filtering. We studied design based on Rose’s hexapole corrector.

Název v anglickém jazyce

Correction of misalignment aberrations of a hexapole corrector using the differential algebra method

Popis výsledku anglicky

Overcoming the limitations of the Schertzer theorem is a long story in electron microscopy. Although the basic principle of a spherical aberration (C3) correction was suggested as early as in 1947 the first experimental correctors of spherical aberration were only realized in the last decade of the 20th century. The recent multipole correctors are designed for high-energynTEM or STEM, where the corrector system enables reaching the atomic resolution. On the othernhand, the corrector for low-energy SEM has been developed but this type of corrector must also contain chromatic aberration (Cc) correction to reduce the effect of the non-zero energy width. Recently, the energies of SEM reach 30 keV and transmission mode (TSEM) is a standard part of the instrument. Standard resolution in TSEM is about 0.6 nm and it is limited by C3. Reaching atomic resolution with this set-up is not a real expectation because of its instability, but the resolution of about 0.2 nm would increase the field of applications. Corrector for these type of instruments should be (a) simple, compact and cheap (b) only spherical aberration of the third,noptionally the fifth order must be corrected (c) effect of the chromatic aberration may be reduced by energy filtering. We studied design based on Rose’s hexapole corrector.

Druh

D - Stať ve sborníku

CEP obor

JA - Elektronika a optoelektronika, elektrotechnika

OECD FORD obor

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Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2016

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

Proceedings of the 15th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation

ISBN

978-80-87441-17-6

ISSN

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e-ISSN

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Počet stran výsledku

4

Strana od-do

50-53

Název nakladatele

Institute of Scientific Instruments CAS

Místo vydání

Brno

Místo konání akce

Skalský dvůr

Datum konání akce

29. 5. 2016

Typ akce podle státní příslušnosti

WRD - Celosvětová akce

Kód UT WoS článku

000391254000023