Comparison of three focus sensors for optical topography measurement of rough surfaces
Identifikátory výsledku
Kód výsledku v IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F19%3A00511898" target="_blank" >RIV/68081731:_____/19:00511898 - isvavai.cz</a>
Nalezeny alternativní kódy
RIV/61989592:15310/19:73596350
Výsledek na webu
<a href="https://www.osapublishing.org/oe/fulltext.cfm?uri=oe-27-23-33459&id=422804" target="_blank" >https://www.osapublishing.org/oe/fulltext.cfm?uri=oe-27-23-33459&id=422804</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1364/OE.27.033459" target="_blank" >10.1364/OE.27.033459</a>
Alternativní jazyky
Jazyk výsledku
angličtina
Název v původním jazyce
Comparison of three focus sensors for optical topography measurement of rough surfaces
Popis výsledku v původním jazyce
The study compares three variants of focus sensors designed for the optical topography measurement of rough surface specimens with submicron accuracy. We present a theoretical analysis of the focus sensor principles and the experimental measurements with a single point laser probe. A low coherent illumination beam was provided by a monochromatic laser source and a rotating diffuser, which reduced the speckles generated by the rough surface. The reflected beam was modulated by three specific optical elements (axicon, double wedge prism, four spherical lenses) realized by a spatial light modulator. A digital camera detected the output intensity patterns that were evaluated by the intensity centroid method. The results showed a good coincidence of the surface profiles obtained by the three sensor variants with the root-mean-square deviations below one micron. We discuss the results obtained for several specimens with various surface roughness and compare the differences between the three focus sensor variants.
Název v anglickém jazyce
Comparison of three focus sensors for optical topography measurement of rough surfaces
Popis výsledku anglicky
The study compares three variants of focus sensors designed for the optical topography measurement of rough surface specimens with submicron accuracy. We present a theoretical analysis of the focus sensor principles and the experimental measurements with a single point laser probe. A low coherent illumination beam was provided by a monochromatic laser source and a rotating diffuser, which reduced the speckles generated by the rough surface. The reflected beam was modulated by three specific optical elements (axicon, double wedge prism, four spherical lenses) realized by a spatial light modulator. A digital camera detected the output intensity patterns that were evaluated by the intensity centroid method. The results showed a good coincidence of the surface profiles obtained by the three sensor variants with the root-mean-square deviations below one micron. We discuss the results obtained for several specimens with various surface roughness and compare the differences between the three focus sensor variants.
Klasifikace
Druh
J<sub>imp</sub> - Článek v periodiku v databázi Web of Science
CEP obor
—
OECD FORD obor
10306 - Optics (including laser optics and quantum optics)
Návaznosti výsledku
Projekt
Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.
Návaznosti
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Ostatní
Rok uplatnění
2019
Kód důvěrnosti údajů
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Údaje specifické pro druh výsledku
Název periodika
Optics Express
ISSN
1094-4087
e-ISSN
—
Svazek periodika
27
Číslo periodika v rámci svazku
23
Stát vydavatele periodika
US - Spojené státy americké
Počet stran výsledku
15
Strana od-do
33459-33473
Kód UT WoS článku
000495871300053
EID výsledku v databázi Scopus
2-s2.0-85075269050