Simulation Study of Low-Dose 4D-STEM Phase Contrast Techniques at the Nanoscale in SEM

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F25%3A00604707" target="_blank" >RIV/68081731:_____/25:00604707 - isvavai.cz</a>

Výsledek na webu

<a href="https://www.mdpi.com/2079-4991/15/1/70" target="_blank" >https://www.mdpi.com/2079-4991/15/1/70</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.3390/nano15010070" target="_blank" >10.3390/nano15010070</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Simulation Study of Low-Dose 4D-STEM Phase Contrast Techniques at the Nanoscale in SEM

Popis výsledku v původním jazyce

Phase contrast imaging is well-suited for studying weakly scattering samples. Its strength lies in its ability to measure how the phase of the electron beam is affected by the sample, even when other imaging techniques yield low contrast. In this study, we explore via simulations two phase contrast techniques: integrated center of mass (iCOM) and ptychography, specifically using the extended ptychographical iterative engine (ePIE). We simulate the four-dimensional scanning transmission electron microscopy (4D-STEM) datasets for specific parameters corresponding to a scanning electron microscope (SEM) with an immersive objective and a given pixelated detector. The performance of these phase contrast techniques is analyzed using a contrast transfer function. Simulated datasets from a sample consisting of graphene sheets and carbon nanotubes are used for iCOM and ePIE reconstructions for two aperture sizes and two electron doses. We highlight the influence of aperture size, showing that for a smaller aperture, the radiation dose is spent mostly on larger sample features, which may aid in imaging sensitive samples while minimizing radiation damage.

Název v anglickém jazyce

Simulation Study of Low-Dose 4D-STEM Phase Contrast Techniques at the Nanoscale in SEM

Popis výsledku anglicky

Phase contrast imaging is well-suited for studying weakly scattering samples. Its strength lies in its ability to measure how the phase of the electron beam is affected by the sample, even when other imaging techniques yield low contrast. In this study, we explore via simulations two phase contrast techniques: integrated center of mass (iCOM) and ptychography, specifically using the extended ptychographical iterative engine (ePIE). We simulate the four-dimensional scanning transmission electron microscopy (4D-STEM) datasets for specific parameters corresponding to a scanning electron microscope (SEM) with an immersive objective and a given pixelated detector. The performance of these phase contrast techniques is analyzed using a contrast transfer function. Simulated datasets from a sample consisting of graphene sheets and carbon nanotubes are used for iCOM and ePIE reconstructions for two aperture sizes and two electron doses. We highlight the influence of aperture size, showing that for a smaller aperture, the radiation dose is spent mostly on larger sample features, which may aid in imaging sensitive samples while minimizing radiation damage.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

20201 - Electrical and electronic engineering

Projekt

<a href="/cs/project/GA21-13541S" target="_blank" >GA21-13541S: Kvantitativní nízkoenergiové 4D-STEM zobrazování radiačně citlivých vzorků</a><br>

Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2025

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Nanomaterials

ISSN

2079-4991

e-ISSN

2079-4991

Svazek periodika

15

Číslo periodika v rámci svazku

1

Stát vydavatele periodika

CH - Švýcarská konfederace

Počet stran výsledku

15

Strana od-do

70

Kód UT WoS článku

001393814800001

EID výsledku v databázi Scopus

2-s2.0-85214526952