Optical and magnetic resonance study of a-SiCxNy films obtained by magnetron sputtering

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F14%3A00431530" target="_blank" >RIV/68378271:_____/14:00431530 - isvavai.cz</a>

Výsledek na webu

<a href="http://dx.doi.org/10.1002/pssb.201451041" target="_blank" >http://dx.doi.org/10.1002/pssb.201451041</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1002/pssb.201451041" target="_blank" >10.1002/pssb.201451041</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Optical and magnetic resonance study of a-SiCxNy films obtained by magnetron sputtering

Popis výsledku v původním jazyce

Amorphous silicon carbonitride (a-SiCxNy) thin films deposited on the SiO2 substrates by reactive magnetron sputtering was studied by Raman and electron paramagnetic resonance (EPR) spectroscopy. Raman analysis indicates the presence of C?N, Si?N, C?C bonds in a-SiCxNy films. Three EPR signals were revealed in a-SiCxNy/SiO2. One of them with g=2.0033 was attributed to the carbon-dangling bonds (CDB). Based on the lineshape and linewidth, the EPR signal was attributed to the unpaired electron delocalizedover sp2 carbon cluster. With the increase of nitrogen (N) content, the spin density of CDB significantly increases. From the temperature dependence of the linewidth and integral intensity of the CDB EPR signal, it was concluded that the antiferromagnetic ordering occurs in spin system. The antiferromagnetic exchange constant between CDBs was found.

Název v anglickém jazyce

Optical and magnetic resonance study of a-SiCxNy films obtained by magnetron sputtering

Popis výsledku anglicky

Amorphous silicon carbonitride (a-SiCxNy) thin films deposited on the SiO2 substrates by reactive magnetron sputtering was studied by Raman and electron paramagnetic resonance (EPR) spectroscopy. Raman analysis indicates the presence of C?N, Si?N, C?C bonds in a-SiCxNy films. Three EPR signals were revealed in a-SiCxNy/SiO2. One of them with g=2.0033 was attributed to the carbon-dangling bonds (CDB). Based on the lineshape and linewidth, the EPR signal was attributed to the unpaired electron delocalizedover sp2 carbon cluster. With the increase of nitrogen (N) content, the spin density of CDB significantly increases. From the temperature dependence of the linewidth and integral intensity of the CDB EPR signal, it was concluded that the antiferromagnetic ordering occurs in spin system. The antiferromagnetic exchange constant between CDBs was found.

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

BM - Fyzika pevných látek a magnetismus

OECD FORD obor

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Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2014

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Physica Status Solidi B-Basic Solid State Physics

ISSN

0370-1972

e-ISSN

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Svazek periodika

251

Číslo periodika v rámci svazku

6

Stát vydavatele periodika

DE - Spolková republika Německo

Počet stran výsledku

8

Strana od-do

1178-1185

Kód UT WoS článku

000337608600007

EID výsledku v databázi Scopus

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