Nanocrystalline diamond films heavily doped by boron: structure, optical and electrical properties

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F19%3A00511648" target="_blank" >RIV/68378271:_____/19:00511648 - isvavai.cz</a>

Výsledek na webu

<a href="http://dx.doi.org/10.1117/12.2521498" target="_blank" >http://dx.doi.org/10.1117/12.2521498</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1117/12.2521498" target="_blank" >10.1117/12.2521498</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Nanocrystalline diamond films heavily doped by boron: structure, optical and electrical properties

Popis výsledku v původním jazyce

A set of nanocrystalline diamond films was grown using microwave plasma enhanced chemical vapor deposition on fused silica substrates from methane diluted by hydrogen: with and without the addition of trimethylborane. The boron to carbon ratio in the gas phase was varied from 0 to 8000 ppm. The boron doped nanocrystalline diamond films were investigated using atomic-force microscopy, Raman spectroscopy, transmittance spectroscopy and electro-physical methods. For analysis of Raman spectra of heavily doped p-type nanocrystalline diamond using Fano contour one should take into account the shift and broadening of the phonon line due to phonon confinement in grains, or phonon scattering by defects. Raman spectra were calculated using a phonon confinement model and Fano contour. Good agreement was found between the calculated and experimental spectra.

Název v anglickém jazyce

Nanocrystalline diamond films heavily doped by boron: structure, optical and electrical properties

Popis výsledku anglicky

A set of nanocrystalline diamond films was grown using microwave plasma enhanced chemical vapor deposition on fused silica substrates from methane diluted by hydrogen: with and without the addition of trimethylborane. The boron to carbon ratio in the gas phase was varied from 0 to 8000 ppm. The boron doped nanocrystalline diamond films were investigated using atomic-force microscopy, Raman spectroscopy, transmittance spectroscopy and electro-physical methods. For analysis of Raman spectra of heavily doped p-type nanocrystalline diamond using Fano contour one should take into account the shift and broadening of the phonon line due to phonon confinement in grains, or phonon scattering by defects. Raman spectra were calculated using a phonon confinement model and Fano contour. Good agreement was found between the calculated and experimental spectra.

Druh

D - Stať ve sborníku

CEP obor

—

OECD FORD obor

10302 - Condensed matter physics (including formerly solid state physics, supercond.)

Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2019

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

International Conference on Micro- and Nano-Electronics 2018

ISBN

978-1-5106-2709-3

ISSN

0277-786X

e-ISSN

—

Počet stran výsledku

10

Strana od-do

1-10

Název nakladatele

SPIE

Místo vydání

Bellingham

Místo konání akce

Zvenigorod

Datum konání akce

1. 10. 2018

Typ akce podle státní příslušnosti

WRD - Celosvětová akce

Kód UT WoS článku

000464735700051