Silicon surface patterning by regular stripes of laser-induced periodic surface structures

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F22%3A00561604" target="_blank" >RIV/68378271:_____/22:00561604 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/68407700:21340/22:00361860

Výsledek na webu

<a href="https://doi.org/10.1016/j.apsusc.2022.154664" target="_blank" >https://doi.org/10.1016/j.apsusc.2022.154664</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.apsusc.2022.154664" target="_blank" >10.1016/j.apsusc.2022.154664</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Silicon surface patterning by regular stripes of laser-induced periodic surface structures

Popis výsledku v původním jazyce

Laser-induced periodic surface structures (LIPSS) formation on the surface of mono-crystalline silicon is reported for a specific fabrication regime of large-area structuring. Using a femtosecond laser at 1030 nm wavelength, a particular range of fluence and beam overlap in two-dimensional scanning scheme has been identified where LIPSS-covered areas organize into stripes perpendicular to the scanning direction. The stripes, where the LIPSS appear, are regularly spaced and located in between the centers of two subsequent Gaussian pulses while the regions receiving the peak pulse fluence are free of LIPSS. The formation of the LIPSS stripes is examined by analyzing local integrated fluence, N-on-1 pulse damage geometry and thresholds of modifications. Processes at play in the generation of such stripes of LIPSS are discussed and an explanation based on interpulse feedback from amorphized areas is proposed.

Název v anglickém jazyce

Silicon surface patterning by regular stripes of laser-induced periodic surface structures

Popis výsledku anglicky

Laser-induced periodic surface structures (LIPSS) formation on the surface of mono-crystalline silicon is reported for a specific fabrication regime of large-area structuring. Using a femtosecond laser at 1030 nm wavelength, a particular range of fluence and beam overlap in two-dimensional scanning scheme has been identified where LIPSS-covered areas organize into stripes perpendicular to the scanning direction. The stripes, where the LIPSS appear, are regularly spaced and located in between the centers of two subsequent Gaussian pulses while the regions receiving the peak pulse fluence are free of LIPSS. The formation of the LIPSS stripes is examined by analyzing local integrated fluence, N-on-1 pulse damage geometry and thresholds of modifications. Processes at play in the generation of such stripes of LIPSS are discussed and an explanation based on interpulse feedback from amorphized areas is proposed.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

10306 - Optics (including laser optics and quantum optics)

Projekt

<a href="/cs/project/EF15_003%2F0000445" target="_blank" >EF15_003/0000445: Pokročilá příprava funkčních materiálů: Od mono k bi- a tri-chromatické excitaci s použitím tvarovaných laserových pulsů</a><br>

Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2022

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Applied Surface Science

ISSN

0169-4332

e-ISSN

1873-5584

Svazek periodika

605

Číslo periodika v rámci svazku

Dec.

Stát vydavatele periodika

NL - Nizozemsko

Počet stran výsledku

8

Strana od-do

154664

Kód UT WoS článku

000856590300001

EID výsledku v databázi Scopus

2-s2.0-85137168308