Influence of process parameters on the structure and properties of chromium oxide films deposited by reactive high power impulse magnetron sputtering

Kód výsledku v IS VaVaI

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Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Influence of process parameters on the structure and properties of chromium oxide films deposited by reactive high power impulse magnetron sputtering

Popis výsledku v původním jazyce

In this study thin chromium oxide coatings were prepared by reactive high power impulse magnetron sputtering (HiPIMs), their structure was evaluated, and testing was performed to determine their tribological properties. The coating depositions were conducted on multiple different substrate materials, encapsulating tool steels, and high temperature nickel super alloys Inconel. To achieve significant ion bombardment of the coated surface, either a bias on the substrate or a positive kick on the sputtering target was applied. The impact of these methods on the structure and properties of the coating was then investigated. The surface and cross-section of coatings underwent examination by scanning electron microscopy (SEM), and chemical analysis was performed using energy-dispersive x-ray spectroscopy (EDS). The structure of the coatings was studied using X-ray diffraction (XRD). The influence of the coating process on surface roughness and the presence of coating defects was further studied using phase shifting interferometry (PSI) and optical light microscopy. Tribological testing was performed by pin on disc method at room temperature and high temperature using Al2O3 counterbodies. During high temperatures tests, coatings exhibited low wear and stable friction, predisposing them to use in application at elevated temperature.

Název v anglickém jazyce

Influence of process parameters on the structure and properties of chromium oxide films deposited by reactive high power impulse magnetron sputtering

Popis výsledku anglicky

In this study thin chromium oxide coatings were prepared by reactive high power impulse magnetron sputtering (HiPIMs), their structure was evaluated, and testing was performed to determine their tribological properties. The coating depositions were conducted on multiple different substrate materials, encapsulating tool steels, and high temperature nickel super alloys Inconel. To achieve significant ion bombardment of the coated surface, either a bias on the substrate or a positive kick on the sputtering target was applied. The impact of these methods on the structure and properties of the coating was then investigated. The surface and cross-section of coatings underwent examination by scanning electron microscopy (SEM), and chemical analysis was performed using energy-dispersive x-ray spectroscopy (EDS). The structure of the coatings was studied using X-ray diffraction (XRD). The influence of the coating process on surface roughness and the presence of coating defects was further studied using phase shifting interferometry (PSI) and optical light microscopy. Tribological testing was performed by pin on disc method at room temperature and high temperature using Al2O3 counterbodies. During high temperatures tests, coatings exhibited low wear and stable friction, predisposing them to use in application at elevated temperature.

Druh

O - Ostatní výsledky

CEP obor

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OECD FORD obor

20506 - Coating and films

Projekt

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Návaznosti

S - Specificky vyzkum na vysokych skolach

Rok uplatnění

2025

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů