Jednočipový mechatronický systém pro skenovací mikroskopy

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21230%2F05%3A03118208" target="_blank" >RIV/68407700:21230/05:03118208 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

CMOS Monolithic Mechatronic Microsystem for Surface Imaging and Force Response Studies

Popis výsledku v původním jazyce

We report on a standalone single-chip (7 mm /spl times/10mm) atomic force microscopy (AFM) unit including a fully integrated array of cantilevers, each of which has individual actuation, detection, and control units so that standard AFM operations can beperformed only by means of the chip without any external controller. The system offers drastically reduced overall size and costs and can be fabricated in standard CMOS technology with some post-CMOS micromachining steps to form the cantilevers. Full integration of microelectronic and micromechanical components on the same chip allows for controlling and monitoring all system functions. The on-chip circuitry notably improves the overall system performance. Circuitry includes analog signal amplificationand filtering stages with offset compensation, analog-to-digital converters, digital proportional-integral-derivative (PID) deflection controllers, sensor-actuator compensation (SAC) filters, and an on-chip digital interface.

Název v anglickém jazyce

CMOS Monolithic Mechatronic Microsystem for Surface Imaging and Force Response Studies

Popis výsledku anglicky

We report on a standalone single-chip (7 mm /spl times/10mm) atomic force microscopy (AFM) unit including a fully integrated array of cantilevers, each of which has individual actuation, detection, and control units so that standard AFM operations can beperformed only by means of the chip without any external controller. The system offers drastically reduced overall size and costs and can be fabricated in standard CMOS technology with some post-CMOS micromachining steps to form the cantilevers. Full integration of microelectronic and micromechanical components on the same chip allows for controlling and monitoring all system functions. The on-chip circuitry notably improves the overall system performance. Circuitry includes analog signal amplificationand filtering stages with offset compensation, analog-to-digital converters, digital proportional-integral-derivative (PID) deflection controllers, sensor-actuator compensation (SAC) filters, and an on-chip digital interface.

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

JB - Senzory, čidla, měření a regulace

OECD FORD obor

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Projekt

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Návaznosti

S - Specificky vyzkum na vysokych skolach

Rok uplatnění

2005

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

IEEE Journal of Solid-State Circuits

ISSN

0018-9200

e-ISSN

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Svazek periodika

40

Číslo periodika v rámci svazku

4

Stát vydavatele periodika

US - Spojené státy americké

Počet stran výsledku

9

Strana od-do

951-959

Kód UT WoS článku

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EID výsledku v databázi Scopus

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