Hydrogen-terminated Diamond Surface as Gas Sensing Layer Working at Room Temperature

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21230%2F15%3A00234637" target="_blank" >RIV/68407700:21230/15:00234637 - isvavai.cz</a>

Výsledek na webu

<a href="http://www.nanocon.eu/files/proceedings/23/papers/4530.pdf" target="_blank" >http://www.nanocon.eu/files/proceedings/23/papers/4530.pdf</a>

DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Hydrogen-terminated Diamond Surface as Gas Sensing Layer Working at Room Temperature

Popis výsledku v původním jazyce

Nanocrystalline diamond (NCD) films were grown on the commercially available sensor product consisted of a bulit-in microheater, a platinum temperature sensor, and a pair of Pt interdigitated electrodes using microwave plasma enhanced chemical vapor deposition process. We investigated the effect of fluorine- and hydrogen-terminated diamond surface on the gas sensing properties at room temperature. The gas sensing properties diamond-based sensor were measured by the changes of electrical resistance to various volatile organic compounds(C6H6, C3H6O, isopropylalcohol) and relative humidity. The comparative sensing performance of hydrogenated diamond surface shows improvement in sensitivity toward benzene, acetone, isopropylalcohol and humid air in contrast to fluorinated diamond surface, where the surface conductivity was suppressed. The sensor functionality was explained by the surface transfer doping effect.

Název v anglickém jazyce

Hydrogen-terminated Diamond Surface as Gas Sensing Layer Working at Room Temperature

Popis výsledku anglicky

Nanocrystalline diamond (NCD) films were grown on the commercially available sensor product consisted of a bulit-in microheater, a platinum temperature sensor, and a pair of Pt interdigitated electrodes using microwave plasma enhanced chemical vapor deposition process. We investigated the effect of fluorine- and hydrogen-terminated diamond surface on the gas sensing properties at room temperature. The gas sensing properties diamond-based sensor were measured by the changes of electrical resistance to various volatile organic compounds(C6H6, C3H6O, isopropylalcohol) and relative humidity. The comparative sensing performance of hydrogenated diamond surface shows improvement in sensitivity toward benzene, acetone, isopropylalcohol and humid air in contrast to fluorinated diamond surface, where the surface conductivity was suppressed. The sensor functionality was explained by the surface transfer doping effect.

Druh

D - Stať ve sborníku

CEP obor

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OECD FORD obor

20201 - Electrical and electronic engineering

Projekt

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Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2015

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

NANOCON 2015, 7TH INTERNATIONAL CONFERENCE

ISBN

978-80-87294-59-8

ISSN

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e-ISSN

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Počet stran výsledku

5

Strana od-do

100-104

Název nakladatele

Tanger

Místo vydání

Ostrava

Místo konání akce

Brno

Datum konání akce

14. 10. 2015

Typ akce podle státní příslušnosti

WRD - Celosvětová akce

Kód UT WoS článku

000374708800016