CMOS-based Micro-fluxgate with Racetrack Core and Solenoid Coils

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21230%2F24%3A00376849" target="_blank" >RIV/68407700:21230/24:00376849 - isvavai.cz</a>

Výsledek na webu

<a href="https://doi.org/10.1016/j.sna.2024.115886" target="_blank" >https://doi.org/10.1016/j.sna.2024.115886</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.sna.2024.115886" target="_blank" >10.1016/j.sna.2024.115886</a>

Jazyk výsledku

angličtina

Název v původním jazyce

CMOS-based Micro-fluxgate with Racetrack Core and Solenoid Coils

Popis výsledku v původním jazyce

This work introduces an integrated fluxgate sensor fabricated using CMOS chip technology. The sensor uses a “racetrack” shape of the core. The material used for the core is VITROVAC 6025F, and the shape was laser-cut from 25 um thick foil. The coils are solenoids fabricated using metal layers of the chip and bonding wires. Sensing and excitation coils have 60 and 40 turns respectively. TSMC D35 technology was used for fabrication. The size of the core is 8 mm x 1.75 mm. Dimensions of the chip are 8 mm x 2.7 mm (21.6 mm2). The sensor was tested in open-loop operation using a sinewave excitation. Sensitivity increases with frequency up to 1.5 MHz, reaching 5000 V/T. This is a significantly higher value than what can be achieved using a flat pick-up coil (around 10 V/T). Fully saturating the core requires a 110 mA excitation current, leading to 300 mW power dissipation in the coil. The Core loss is 100 mW at 1 MHz excitation. The Noise at 1 Hz may be as low as 2nT/sqrt(Hz) depending on excitation signal parameters. The typical offset is below 1 uT.

Název v anglickém jazyce

CMOS-based Micro-fluxgate with Racetrack Core and Solenoid Coils

Popis výsledku anglicky

This work introduces an integrated fluxgate sensor fabricated using CMOS chip technology. The sensor uses a “racetrack” shape of the core. The material used for the core is VITROVAC 6025F, and the shape was laser-cut from 25 um thick foil. The coils are solenoids fabricated using metal layers of the chip and bonding wires. Sensing and excitation coils have 60 and 40 turns respectively. TSMC D35 technology was used for fabrication. The size of the core is 8 mm x 1.75 mm. Dimensions of the chip are 8 mm x 2.7 mm (21.6 mm2). The sensor was tested in open-loop operation using a sinewave excitation. Sensitivity increases with frequency up to 1.5 MHz, reaching 5000 V/T. This is a significantly higher value than what can be achieved using a flat pick-up coil (around 10 V/T). Fully saturating the core requires a 110 mA excitation current, leading to 300 mW power dissipation in the coil. The Core loss is 100 mW at 1 MHz excitation. The Noise at 1 Hz may be as low as 2nT/sqrt(Hz) depending on excitation signal parameters. The typical offset is below 1 uT.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

20201 - Electrical and electronic engineering

Projekt

<a href="/cs/project/GA24-12705S" target="_blank" >GA24-12705S: Nové magnetické senzory polohy</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2024

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Sensors and Actuators A: Physical

ISSN

0924-4247

e-ISSN

1873-3069

Svazek periodika

379

Číslo periodika v rámci svazku

December

Stát vydavatele periodika

CH - Švýcarská konfederace

Počet stran výsledku

8

Strana od-do

—

Kód UT WoS článku

001316348100001

EID výsledku v databázi Scopus

2-s2.0-85203490439