Slumping of Si wafers at high temperature

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21340%2F13%3A00212409" target="_blank" >RIV/68407700:21340/13:00212409 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/60461373:22310/13:43896886

Výsledek na webu

<a href="http://dx.doi.org/10.1117/12.2021586" target="_blank" >http://dx.doi.org/10.1117/12.2021586</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1117/12.2021586" target="_blank" >10.1117/12.2021586</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Slumping of Si wafers at high temperature

Popis výsledku v původním jazyce

Space X-ray imaging telescopes have delivered unique observations that have been significantly contributing to many important discoveries of current astrophysics. For future telescopes with a larger collecting area and a better angular resolution, the limiting factor is their X-ray reflecting mirror array. Therefore, for a successful construction of future lightweight and highly reflecting X-ray mirrors, new cost-effective technologies and progressive materials are needed. Currently, the very promisingmaterials are silicon foils which are commercially produced on a large scale. We focused on the plastic deformation of thin monocrystalline silicon foils, which was necessary for the precise thermal forming of the foils to 3D shapes. To achieve the plastic deformation, we applied forced slumping at temperatures from 1200 to 1400°C. The final shapes and the surface quality of the foils were measured using a Taylor Hobson contact profilometer and examined with an Atomic Forced Microscopy.

Název v anglickém jazyce

Slumping of Si wafers at high temperature

Popis výsledku anglicky

Space X-ray imaging telescopes have delivered unique observations that have been significantly contributing to many important discoveries of current astrophysics. For future telescopes with a larger collecting area and a better angular resolution, the limiting factor is their X-ray reflecting mirror array. Therefore, for a successful construction of future lightweight and highly reflecting X-ray mirrors, new cost-effective technologies and progressive materials are needed. Currently, the very promisingmaterials are silicon foils which are commercially produced on a large scale. We focused on the plastic deformation of thin monocrystalline silicon foils, which was necessary for the precise thermal forming of the foils to 3D shapes. To achieve the plastic deformation, we applied forced slumping at temperatures from 1200 to 1400°C. The final shapes and the surface quality of the foils were measured using a Taylor Hobson contact profilometer and examined with an Atomic Forced Microscopy.

Druh

D - Stať ve sborníku

CEP obor

JJ - Ostatní materiály

OECD FORD obor

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Projekt

<a href="/cs/project/GA13-33324S" target="_blank" >GA13-33324S: Rentgenový monitor račí oko</a><br>

Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2013

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

Proceedings of SPIE Vol. 8777 Damage to VUV, EUV, and X-ray Optics IV; and EUV and X-ray Optics: Synergy between Laboratory and Space III

ISBN

978-0-8194-9579-2

ISSN

0277-786X

e-ISSN

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Počet stran výsledku

7

Strana od-do

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Název nakladatele

SPIE

Místo vydání

Bellingham (stát Washington)

Místo konání akce

Praha

Datum konání akce

15. 4. 2013

Typ akce podle státní příslušnosti

EUR - Evropská akce

Kód UT WoS článku

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