XUV spectra of 2nd transition row elements: identification of 3d?4p and 3d?4f transition arrays

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21340%2F15%3A00238155" target="_blank" >RIV/68407700:21340/15:00238155 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/68378271:_____/15:00466449

Výsledek na webu

<a href="http://iopscience.iop.org/article/10.1088/0953-4075/48/24/245009" target="_blank" >http://iopscience.iop.org/article/10.1088/0953-4075/48/24/245009</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1088/0953-4075/48/24/245009" target="_blank" >10.1088/0953-4075/48/24/245009</a>

Jazyk výsledku

angličtina

Název v původním jazyce

XUV spectra of 2nd transition row elements: identification of 3d?4p and 3d?4f transition arrays

Popis výsledku v původním jazyce

The use of laser produced plasmas (LPPs) in extreme ultraviolet/soft x-ray lithography and metrology at 13.5 nm has been widely reported and recent research efforts have focused on developing next generation sources for lithography, surface morphology, patterning and microscopy at shorter wavelengths. In this paper, the spectra emitted from LPPs of the 2nd transition row elements from yttrium (Z=39) to palladium (Z=46), with the exception of zirconium (Z=40) and technetium (Z=43), produced by two Nd:YAGlasers which delivered up to 600 mJ in 7 ns and 230 mJ in 170 ps, respectively, are reported. Intense emission was observed in the 2?8 nm spectral region resulting from unresolved transition arrays (UTAs) due to 3d?4p, 3d?4f and 3p?3d transitions. Thesetransitions in a number of ion stages of yttrium, niobium, ruthenium and rhodium were identified by comparison with results from Cowan code calculations and previous studies. The theoretical data were parameterized using the UTA formalis

Název v anglickém jazyce

XUV spectra of 2nd transition row elements: identification of 3d?4p and 3d?4f transition arrays

Popis výsledku anglicky

The use of laser produced plasmas (LPPs) in extreme ultraviolet/soft x-ray lithography and metrology at 13.5 nm has been widely reported and recent research efforts have focused on developing next generation sources for lithography, surface morphology, patterning and microscopy at shorter wavelengths. In this paper, the spectra emitted from LPPs of the 2nd transition row elements from yttrium (Z=39) to palladium (Z=46), with the exception of zirconium (Z=40) and technetium (Z=43), produced by two Nd:YAGlasers which delivered up to 600 mJ in 7 ns and 230 mJ in 170 ps, respectively, are reported. Intense emission was observed in the 2?8 nm spectral region resulting from unresolved transition arrays (UTAs) due to 3d?4p, 3d?4f and 3p?3d transitions. Thesetransitions in a number of ion stages of yttrium, niobium, ruthenium and rhodium were identified by comparison with results from Cowan code calculations and previous studies. The theoretical data were parameterized using the UTA formalis

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

BH - Optika, masery a lasery

OECD FORD obor

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Projekt

<a href="/cs/project/LG13029" target="_blank" >LG13029: Výzkum v rámci Mezinárodního centra hustého magnetizovaného plazmatu</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2015

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Journal of Physics B: Atomic, Molecular and Optical Physics

ISSN

0953-4075

e-ISSN

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Svazek periodika

48

Číslo periodika v rámci svazku

24

Stát vydavatele periodika

GB - Spojené království Velké Británie a Severního Irska

Počet stran výsledku

12

Strana od-do

"245009-1"-"245009-12"

Kód UT WoS článku

000368622900021

EID výsledku v databázi Scopus

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