Thin Oxide Films Prepared by Laser-Assisted Metal-Organic CVD: Structural and Gas Sensing Properties

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21460%2F05%3A00113051" target="_blank" >RIV/68407700:21460/05:00113051 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Thin Oxide Films Prepared by Laser-Assisted Metal-Organic CVD: Structural and Gas Sensing Properties

Popis výsledku v původním jazyce

Amorphous and polycrystalline tin oxide (SnOx) thin films were grown by ArF excimer laser-induced metal-organic chemical vapour deposition (L-MOCVD) from tetramethyltin (TMT) and oxygen as precursors. The films structure and composition were investigatedby X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS). The deposition temperature and the ratio of the TMT and oxygen flow rates have been optimised in order to minimise the residual carbon content and to achieve stoichiometric SnO2 films. The films deposited at room temperature were amorphous, strongly substoichiometric [O]:[Sn] = 1.3 and with a high residual carbon content depending on the TMT and oxygen ratio. Films grown at 300 °C were polycrystalline with [O]:[Sn] ratios up to 1.8and with a much lower carbon content. The tin oxide films were subsequently used as sensing layers for gas detection. A satisfactory sensor performance was obtained for the oxidising NO2 and the reducing N2O, CH4, SO2, CO, CO2, H2 gases.

Název v anglickém jazyce

Thin Oxide Films Prepared by Laser-Assisted Metal-Organic CVD: Structural and Gas Sensing Properties

Popis výsledku anglicky

Amorphous and polycrystalline tin oxide (SnOx) thin films were grown by ArF excimer laser-induced metal-organic chemical vapour deposition (L-MOCVD) from tetramethyltin (TMT) and oxygen as precursors. The films structure and composition were investigatedby X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS). The deposition temperature and the ratio of the TMT and oxygen flow rates have been optimised in order to minimise the residual carbon content and to achieve stoichiometric SnO2 films. The films deposited at room temperature were amorphous, strongly substoichiometric [O]:[Sn] = 1.3 and with a high residual carbon content depending on the TMT and oxygen ratio. Films grown at 300 °C were polycrystalline with [O]:[Sn] ratios up to 1.8and with a much lower carbon content. The tin oxide films were subsequently used as sensing layers for gas detection. A satisfactory sensor performance was obtained for the oxidising NO2 and the reducing N2O, CH4, SO2, CO, CO2, H2 gases.

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

BH - Optika, masery a lasery

OECD FORD obor

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Projekt

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Návaznosti

V - Vyzkumna aktivita podporovana z jinych verejnych zdroju

Rok uplatnění

2005

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Surface and Coatings Technology

ISSN

0257-8972

e-ISSN

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Svazek periodika

200

Číslo periodika v rámci svazku

1-4

Stát vydavatele periodika

NL - Nizozemsko

Počet stran výsledku

4

Strana od-do

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Kód UT WoS článku

000232327800233

EID výsledku v databázi Scopus

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