DLC Layers prepared by PLD with Ion Bombardment

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21460%2F12%3A00198205" target="_blank" >RIV/68407700:21460/12:00198205 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

DLC Layers prepared by PLD with Ion Bombardment

Popis výsledku v původním jazyce

Physical and mechanical properties of diamond-like carbon (DLC) thin layers prepared by pulsed laser deposition with ion bombardment were studied. DLC films were fabricated by pulsed laser deposition technique (PLD). The film growth was modified during the deposition by ion bombardment with argon and krypton ions. The films with high and low diamond/graphite ratio were prepared by changing the laser energy density on the graphite target from 4 Jcm-2 to 14 Jcm-2. Energy of ions was changed by gun voltageand ionic current and was up to 210 eV. The content of sp2 "graphite" and sp3 "diamond" bonds was measured using X-ray photoelectron and X-ray induced Auger electron spectroscopies. We found the highest sp3 contend for ions bombardment of 40 eV. We studied mechanical properties of layers. Hardness and reduced Young's modulus were determined using the method Quasistatic nanoindentation and a special diamond Fluid Berkovich tip. Young´s modulus was studied through the use of resonant ultr

Název v anglickém jazyce

DLC Layers prepared by PLD with Ion Bombardment

Popis výsledku anglicky

Physical and mechanical properties of diamond-like carbon (DLC) thin layers prepared by pulsed laser deposition with ion bombardment were studied. DLC films were fabricated by pulsed laser deposition technique (PLD). The film growth was modified during the deposition by ion bombardment with argon and krypton ions. The films with high and low diamond/graphite ratio were prepared by changing the laser energy density on the graphite target from 4 Jcm-2 to 14 Jcm-2. Energy of ions was changed by gun voltageand ionic current and was up to 210 eV. The content of sp2 "graphite" and sp3 "diamond" bonds was measured using X-ray photoelectron and X-ray induced Auger electron spectroscopies. We found the highest sp3 contend for ions bombardment of 40 eV. We studied mechanical properties of layers. Hardness and reduced Young's modulus were determined using the method Quasistatic nanoindentation and a special diamond Fluid Berkovich tip. Young´s modulus was studied through the use of resonant ultr

Druh

O - Ostatní výsledky

CEP obor

BH - Optika, masery a lasery

OECD FORD obor

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Projekt

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Návaznosti

S - Specificky vyzkum na vysokych skolach

Rok uplatnění

2012

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů