Diagnostics and Modeling of Gas Puff Target Laser Plasma Radiation Source

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21670%2F12%3A00201796" target="_blank" >RIV/68407700:21670/12:00201796 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/68407700:21460/12:00201796

Výsledek na webu

<a href="http://www.euvlitho.com" target="_blank" >http://www.euvlitho.com</a>

DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Diagnostics and Modeling of Gas Puff Target Laser Plasma Radiation Source

Popis výsledku v původním jazyce

Here we present a study of XUV emission characteristics of nitrogen plasma induced by infrared laser pulse (800 mJ / 7 ns) focused into a gas puff target. Spatial distribution of nitrogen density was determined by EUV radiography at the wavelength 13.5 nm. We used Gaussian function to approximate the cross-section of the gas puff target in the direction perpendicular to the axis of the nozzle. The value of target mass density was estimated to be 3.7.10-4 g/cm3 at the distance z = 0.5mm from the nozzle and 4.9.10-4 g/cm3 at z = 0.25 mm from the nozzle. The resulting density profile at the focal region and measured time dependences of laser power were introduced as input data to 2D RMHD (Radiation-Magneto-Hydro-Dynamic) code Z* (EPPRA s.a.s, France). Spatial developments of nitrogen plasma quantities were modeled. The evaluated electron temperature at the center of gas puff target exceeded the value Te ~ 34 eV. The related peak value of emitted energy density, in the wavelength region 2.

Název v anglickém jazyce

Diagnostics and Modeling of Gas Puff Target Laser Plasma Radiation Source

Popis výsledku anglicky

Here we present a study of XUV emission characteristics of nitrogen plasma induced by infrared laser pulse (800 mJ / 7 ns) focused into a gas puff target. Spatial distribution of nitrogen density was determined by EUV radiography at the wavelength 13.5 nm. We used Gaussian function to approximate the cross-section of the gas puff target in the direction perpendicular to the axis of the nozzle. The value of target mass density was estimated to be 3.7.10-4 g/cm3 at the distance z = 0.5mm from the nozzle and 4.9.10-4 g/cm3 at z = 0.25 mm from the nozzle. The resulting density profile at the focal region and measured time dependences of laser power were introduced as input data to 2D RMHD (Radiation-Magneto-Hydro-Dynamic) code Z* (EPPRA s.a.s, France). Spatial developments of nitrogen plasma quantities were modeled. The evaluated electron temperature at the center of gas puff target exceeded the value Te ~ 34 eV. The related peak value of emitted energy density, in the wavelength region 2.

Druh

O - Ostatní výsledky

CEP obor

BL - Fyzika plasmatu a výboje v plynech

OECD FORD obor

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Projekt

<a href="/cs/project/EE.2.3.20.0092" target="_blank" >EE.2.3.20.0092: Rozvoj výzkumného týmu BIO-OPT-XUV na FBMI ČVUT</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2012

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů