Computational Study of Interaction Between Multicomponent Plasma and Solid
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F11%3A10109814" target="_blank" >RIV/00216208:11320/11:10109814 - isvavai.cz</a>
Result on the web
<a href="http://www.mff.cuni.cz/veda/konference/wds/proc/pdf11/WDS11_218_f2_Ibehej.pdf" target="_blank" >http://www.mff.cuni.cz/veda/konference/wds/proc/pdf11/WDS11_218_f2_Ibehej.pdf</a>
DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Computational Study of Interaction Between Multicomponent Plasma and Solid
Original language description
Presented computer model simulates an interaction of low-temperature Ar/O2 plasma with conductive solid substrate. Mixtures of argon with electronegative gases are often used in material processing technologies. The results can also be used for an analysis of Langmuir probe measurements. Electrostatic potential, number densities of species contained in plasma near the biased substrate and fluxes of the species to the substrate are studied in both static and dynamic regimes. Presented two-dimensional simulation was written in C language with additional parallel computing and force calculation libraries. Computational technique is a hybrid Molecular Dynamics / Monte Carlo particle approach with advanced collisions-computing method and a two-dimensional Particle in Cell force calculation.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
BL - Plasma physics and discharge through gases
OECD FORD branch
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Result continuities
Project
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Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)<br>S - Specificky vyzkum na vysokych skolach
Others
Publication year
2011
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
WDS'11 Proceedings of Contributed Papers: Part II ? Physics of Plasmas and Ionized Media
ISBN
978-80-7378-185-9
ISSN
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e-ISSN
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Number of pages
4
Pages from-to
111-114
Publisher name
Matfyzpress
Place of publication
Praha
Event location
Praha
Event date
May 31, 2011
Type of event by nationality
EUR - Evropská akce
UT code for WoS article
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