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Computational Study of Interaction Between Multicomponent Plasma and Solid

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F11%3A10109814" target="_blank" >RIV/00216208:11320/11:10109814 - isvavai.cz</a>

  • Result on the web

    <a href="http://www.mff.cuni.cz/veda/konference/wds/proc/pdf11/WDS11_218_f2_Ibehej.pdf" target="_blank" >http://www.mff.cuni.cz/veda/konference/wds/proc/pdf11/WDS11_218_f2_Ibehej.pdf</a>

  • DOI - Digital Object Identifier

Alternative languages

  • Result language

    angličtina

  • Original language name

    Computational Study of Interaction Between Multicomponent Plasma and Solid

  • Original language description

    Presented computer model simulates an interaction of low-temperature Ar/O2 plasma with conductive solid substrate. Mixtures of argon with electronegative gases are often used in material processing technologies. The results can also be used for an analysis of Langmuir probe measurements. Electrostatic potential, number densities of species contained in plasma near the biased substrate and fluxes of the species to the substrate are studied in both static and dynamic regimes. Presented two-dimensional simulation was written in C language with additional parallel computing and force calculation libraries. Computational technique is a hybrid Molecular Dynamics / Monte Carlo particle approach with advanced collisions-computing method and a two-dimensional Particle in Cell force calculation.

  • Czech name

  • Czech description

Classification

  • Type

    D - Article in proceedings

  • CEP classification

    BL - Plasma physics and discharge through gases

  • OECD FORD branch

Result continuities

  • Project

  • Continuities

    Z - Vyzkumny zamer (s odkazem do CEZ)<br>S - Specificky vyzkum na vysokych skolach

Others

  • Publication year

    2011

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Article name in the collection

    WDS'11 Proceedings of Contributed Papers: Part II ? Physics of Plasmas and Ionized Media

  • ISBN

    978-80-7378-185-9

  • ISSN

  • e-ISSN

  • Number of pages

    4

  • Pages from-to

    111-114

  • Publisher name

    Matfyzpress

  • Place of publication

    Praha

  • Event location

    Praha

  • Event date

    May 31, 2011

  • Type of event by nationality

    EUR - Evropská akce

  • UT code for WoS article