Modelling of RF discharge in argon plasma

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F07%3A00320055" target="_blank" >RIV/68378271:_____/07:00320055 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Modelling of RF discharge in argon plasma
Original language description
An one-dimensional hybrid model of RF discharge in low-temperature argon plasma is presented in our paper. The hybrid model consists of two parts?particle model which simulates fast electrons while fluid model simulates slow electrons and positive argonions. Typical results of our calculations presented in this paper are total RF current and RF voltage waveforms on the planar substrate immersed into argon plasma. The next results which can be found here are the ion, electron and displacement current waveforms on the substrate.
Czech name
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Czech description
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Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year
2007
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
Proceedings of the International Conference on Computational Methods in Science and Engineering 2007 (ICCMSE 2007): Volume 2, Part B
ISBN
978-0-7354-0476-2
ISSN
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e-ISSN
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Number of pages
4
Pages from-to
1240-1243
Publisher name
American Institut of Physics
Place of publication
Melville
Event location
Corfu
Event date
Sep 25, 2007
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
000252602900305

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