Energy Resolved Ion Mass Spectroscopy of the Pulsed Magnetron Discharge

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F12%3A10133150" target="_blank" >RIV/00216208:11320/12:10133150 - isvavai.cz</a>
Result on the web
<a href="http://www.mff.cuni.cz/veda/konference/wds/proc/pdf12/WDS12_214_f2_Kluson.pdf" target="_blank" >http://www.mff.cuni.cz/veda/konference/wds/proc/pdf12/WDS12_214_f2_Kluson.pdf</a>
DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Energy Resolved Ion Mass Spectroscopy of the Pulsed Magnetron Discharge
Original language description
The main parameter, which determines the properties of the growing thin film, is energy delivered to the surface by impacting particles. In this paper, we concern with the energy distributions of ions in the magnetron discharge designated for the deposition of Ti layers. The measurements were performed by means of a combined energy and mass analyzer. This device enables measurement of energy distributions of individual species. It is well known that in magnetron sputtering different regimes of the discharge excitation can lead to substantial distinctions of the plasma parameters. Here we focused on the pulsed regime. Energies of dominant ions 40Ar+ and 48Ti+ measured in time synchronization with voltage pulses on the cathode are reported. There is a significant abundance of particles with higher energies in the distribution of Ti ions. On the contrary, the energy of Ar ions corresponds to the value of plasma potential. This observation is explained by different ways of origin of these
Czech name
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Czech description
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Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>S - Specificky vyzkum na vysokych skolach

Publication year
2012
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
WDS'12 Proceedings of Contributed Papers: Part II - Physics of Plasmas and Ionized Media
ISBN
978-80-7378-225-2
ISSN
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e-ISSN
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Number of pages
6
Pages from-to
81-86
Publisher name
Matfyzpress
Place of publication
Praha
Event location
Praha
Event date
May 29, 2012
Type of event by nationality
EUR - Evropská akce
UT code for WoS article
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