Direct current and high power impulse magnetron sputtering discharges with a positively biased anode
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F21%3A00552303" target="_blank" >RIV/68378271:_____/21:00552303 - isvavai.cz</a>
Result on the web
<a href="http://hdl.handle.net/11104/0327435" target="_blank" >http://hdl.handle.net/11104/0327435</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1116/6.0001054" target="_blank" >10.1116/6.0001054</a>
Alternative languages
Result language
angličtina
Original language name
Direct current and high power impulse magnetron sputtering discharges with a positively biased anode
Original language description
A magnetron sputtering discharge with a positively biased anode in argon gas is investigated by Langmuir probe diagnostics and by energy-resolved mass spectrometry. The discharge is operated in continuous (direct current) and in pulsed (high power impulse magnetron sputtering, Hi) mode with a Ti target and in Ar gas. Singly-charged Ar.+., Ti.+., and Ar.2..+. and doubly-charged Ar.2+. and Ti.2+. ions are observed. A novel approach is to bias the magnetron anode. Application of a positive anode voltage shifts the kinetic energies of plasma ions by qe.0.V.a., where V.a. is the anode voltage and qe.0. is the ion charge. It allows for an effective control of plasma ion energies.
Czech name
—
Czech description
—
Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
—
OECD FORD branch
10305 - Fluids and plasma physics (including surface physics)
Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2021
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Journal of Vacuum Science & Technology A : Vacuum, Surfaces and Films
ISSN
0734-2101
e-ISSN
1520-8559
Volume of the periodical
39
Issue of the periodical within the volume
4
Country of publishing house
US - UNITED STATES
Number of pages
15
Pages from-to
043007
UT code for WoS article
000665103800001
EID of the result in the Scopus database
2-s2.0-85108705144