Ion energy distribution of plasma ions of a hollow cathode discharge in Ar + N2 and Ar + O2 gas mixtures

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F22%3A00564937" target="_blank" >RIV/68378271:_____/22:00564937 - isvavai.cz</a>
Result on the web
<a href="https://hdl.handle.net/11104/0336517" target="_blank" >https://hdl.handle.net/11104/0336517</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1140/epjd/s10053-022-00539-8" target="_blank" >10.1140/epjd/s10053-022-00539-8</a>

Result language
angličtina
Original language name
Ion energy distribution of plasma ions of a hollow cathode discharge in Ar + N2 and Ar + O2 gas mixtures
Original language description
A hollow cathode discharge with a Ti cathode and a positively biased ring anode was operated in Ar + N2 or Ar + O2 gas mixtures. The energy distribution of plasma ions is investigated with the help of energy-resolved mass spectrometry. Singly and doubly charged Ar+ and Ar2+ ions and molecular N2+ or O2+ ions are the most abundant ionic species. The kinetic energy of all plasma ions is enhanced by a positive anode voltage.
Czech name
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Czech description
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Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10305 - Fluids and plasma physics (including surface physics)

Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year
2022
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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