A positively biased external anode for energy control of plasma ions: hollow cathode and magnetron sputtering discharge

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F21%3A00552302" target="_blank" >RIV/68378271:_____/21:00552302 - isvavai.cz</a>
Result on the web
<a href="http://hdl.handle.net/11104/0327434" target="_blank" >http://hdl.handle.net/11104/0327434</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1088/1361-6595/abe0cc" target="_blank" >10.1088/1361-6595/abe0cc</a>

Result language
angličtina
Original language name
A positively biased external anode for energy control of plasma ions: hollow cathode and magnetron sputtering discharge
Original language description
The performance of a positively biased external ring anode in combination with a hollow cathode (HC) discharge or a magnetron sputtering (MS) discharge, both with a Ti cathode and with Ar as working gas, is investigated. Plasma and floating potential increase as function of anode voltage. Energy-resolved mass spectrometry reveals that the kinetic energy of argon and titanium ions is enhanced by a positive anode voltage allowing for an effective energy control of plasma ions.
Czech name
—
Czech description
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Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
—
OECD FORD branch
20506 - Coating and films

Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2021
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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