Closely spaced SiGe barns as stressor structures for strain-enhancement in silicon
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F13%3A10133654" target="_blank" >RIV/00216208:11320/13:10133654 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1063/1.4789507" target="_blank" >http://dx.doi.org/10.1063/1.4789507</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1063/1.4789507" target="_blank" >10.1063/1.4789507</a>
Alternative languages
Result language
angličtina
Original language name
Closely spaced SiGe barns as stressor structures for strain-enhancement in silicon
Original language description
We present tensile and compressive strains realized within the same Si capping layer on an array of SiGe islands grown on pit-patterned (001) Si substrates. The strain distributions are obtained from synchrotron X-ray diffraction studies in combination with three-dimensional finite element calculations and simulations of the diffracted intensities. For barn-shaped islands grown at 720 degrees C with average Ge contents of 30%, the Si cap layer is misfit-and threading-dislocation free and exhibits compressive strains as high as 0.8% in positions between the islands and tensile strains of up to 1% on top of the islands.
Czech name
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Czech description
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Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BM - Solid-state physics and magnetism
OECD FORD branch
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Result continuities
Project
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Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2013
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Applied Physics Letters
ISSN
0003-6951
e-ISSN
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Volume of the periodical
102
Issue of the periodical within the volume
3
Country of publishing house
US - UNITED STATES
Number of pages
4
Pages from-to
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UT code for WoS article
000314032600053
EID of the result in the Scopus database
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