Time-resolved Langmuir probe investigation of hybrid high power impulse magnetron sputtering discharges
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F13%3A10191354" target="_blank" >RIV/00216208:11320/13:10191354 - isvavai.cz</a>
Alternative codes found
RIV/68378271:_____/13:00391437
Result on the web
<a href="http://dx.doi.org/10.1016/j.vacuum.2012.02.047" target="_blank" >http://dx.doi.org/10.1016/j.vacuum.2012.02.047</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.vacuum.2012.02.047" target="_blank" >10.1016/j.vacuum.2012.02.047</a>
Alternative languages
Result language
angličtina
Original language name
Time-resolved Langmuir probe investigation of hybrid high power impulse magnetron sputtering discharges
Original language description
The paper focuses on time-resolved diagnostics of unipolar hybrid-dual-High Power Impulse Magnetron Sputtering (hybrid-dual-HiPIMS) discharges. The newly developed sputtering system is based on a combination of dual-HiPIMS with a mid-frequency (MF) discharge. The most important feature of hybrid-dual-HiPIMS systems is the MF pre-ionization which causes/allows: (i) a significant reduction of working pressure by more than one order of magnitude, and (ii) faster ignition and development of HiPIMS pulses. Parameters such as mean electron energy, electron density and electron energy probability function (EEPF) were obtained from time-resolved Langmuir probe diagnostics to demonstrate the aforementioned effects. Calorimetric probe diagnostics were used for determination of the total power density flux. Power flux contributions of particular species, e.g. ions, electrons and neutrals, were estimated as well.
Czech name
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Czech description
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Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BL - Plasma physics and discharge through gases
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2013
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Vacuum
ISSN
0042-207X
e-ISSN
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Volume of the periodical
90
Issue of the periodical within the volume
duben
Country of publishing house
GB - UNITED KINGDOM
Number of pages
6
Pages from-to
176-181
UT code for WoS article
000313089800031
EID of the result in the Scopus database
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