Effect of mid-frequency discharge assistance on dual-high power impulse magnetron sputtering
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F12%3A00377074" target="_blank" >RIV/68378271:_____/12:00377074 - isvavai.cz</a>
Alternative codes found
RIV/00216208:11320/12:10130572
Result on the web
<a href="http://dx.doi.org/10.1016/j.surfcoat.2011.11.043" target="_blank" >http://dx.doi.org/10.1016/j.surfcoat.2011.11.043</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.surfcoat.2011.11.043" target="_blank" >10.1016/j.surfcoat.2011.11.043</a>
Alternative languages
Result language
angličtina
Original language name
Effect of mid-frequency discharge assistance on dual-high power impulse magnetron sputtering
Original language description
The present paper is focused on time-resolved diagnostics of the simultaneous combination of dual mid frequency and dual-high power impulse magnetron sputtering discharges (so-called hybrid-dual-HiPIMS systems). The magnetrons in dual configuration are electrically confined, i.e. electrodes are alternately operated as an anode?cathode (and vice versa) during the sputtering. The dual MF discharge causes a pre-ionization effect which is an important feature because of: (i) a significant reduction of the working pressure by more than one order of magnitude, (ii) an increase of electron and ion energy, and (iii) an increase of the deposition rate. The time-resolved IVDF measurements revealed that ions with high energy generated at the cathode arrive at thesubstrate position about 25?30 ?s after the HiPIMS pulse ignition. The effect of the hybrid system is illustrated on the deposition of Ti?Cu films.
Czech name
—
Czech description
—
Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BL - Plasma physics and discharge through gases
OECD FORD branch
—
Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2012
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Surface and Coatings Technology
ISSN
0257-8972
e-ISSN
—
Volume of the periodical
206
Issue of the periodical within the volume
11-12
Country of publishing house
CH - SWITZERLAND
Number of pages
9
Pages from-to
2801-2809
UT code for WoS article
000301017300010
EID of the result in the Scopus database
—