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Deposition of TiO2 Nanoparticles by Means of Hollow Cathode Plasma Jet in DC Regime

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F14%3A10290801" target="_blank" >RIV/00216208:11320/14:10290801 - isvavai.cz</a>

  • Result on the web

    <a href="http://www.mff.cuni.cz/veda/konference/wds/proc/pdf14/WDS14_49_f2_Perekrestov.pdf" target="_blank" >http://www.mff.cuni.cz/veda/konference/wds/proc/pdf14/WDS14_49_f2_Perekrestov.pdf</a>

  • DOI - Digital Object Identifier

Alternative languages

  • Result language

    angličtina

  • Original language name

    Deposition of TiO2 Nanoparticles by Means of Hollow Cathode Plasma Jet in DC Regime

  • Original language description

    TiO2 nanoparticles have been investigated in this work. Nanoparticles were obtained in Ar plasma on monocrystaline Si(111) substrate by means of gas-phase deposition using hollow cathode plasma jet (HCPJ). Oxygen was introduced separately from argon through inlet in a chamber. The material of a cathode is pure titanium. The explanation of nanoparticles growth mechanism is given. Morphology of thin films surface was investigated by the atomic force microscope (AFM). A chemical composition of the thin films was investigated by means of energy-dispersive x-ray analysis (EDX).

  • Czech name

  • Czech description

Classification

  • Type

    D - Article in proceedings

  • CEP classification

    BL - Plasma physics and discharge through gases

  • OECD FORD branch

Result continuities

  • Project

    <a href="/en/project/GAP205%2F11%2F0386" target="_blank" >GAP205/11/0386: Advanced experimental research of discharge plasma sources applied for deposition of nanostructured thin films</a><br>

  • Continuities

    S - Specificky vyzkum na vysokych skolach<br>I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Others

  • Publication year

    2014

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Article name in the collection

    WDS 2014 - Proceedings of Contributed Papers - Physics

  • ISBN

    978-80-7378-276-4

  • ISSN

  • e-ISSN

  • Number of pages

    5

  • Pages from-to

    275-279

  • Publisher name

    Matfyzpress

  • Place of publication

    Praha

  • Event location

    Praha

  • Event date

    Jun 3, 2014

  • Type of event by nationality

    EUR - Evropská akce

  • UT code for WoS article