Deposition of TiO2 Nanoparticles by Means of Hollow Cathode Plasma Jet in DC Regime
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F14%3A10290801" target="_blank" >RIV/00216208:11320/14:10290801 - isvavai.cz</a>
Result on the web
<a href="http://www.mff.cuni.cz/veda/konference/wds/proc/pdf14/WDS14_49_f2_Perekrestov.pdf" target="_blank" >http://www.mff.cuni.cz/veda/konference/wds/proc/pdf14/WDS14_49_f2_Perekrestov.pdf</a>
DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Deposition of TiO2 Nanoparticles by Means of Hollow Cathode Plasma Jet in DC Regime
Original language description
TiO2 nanoparticles have been investigated in this work. Nanoparticles were obtained in Ar plasma on monocrystaline Si(111) substrate by means of gas-phase deposition using hollow cathode plasma jet (HCPJ). Oxygen was introduced separately from argon through inlet in a chamber. The material of a cathode is pure titanium. The explanation of nanoparticles growth mechanism is given. Morphology of thin films surface was investigated by the atomic force microscope (AFM). A chemical composition of the thin films was investigated by means of energy-dispersive x-ray analysis (EDX).
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
BL - Plasma physics and discharge through gases
OECD FORD branch
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Result continuities
Project
<a href="/en/project/GAP205%2F11%2F0386" target="_blank" >GAP205/11/0386: Advanced experimental research of discharge plasma sources applied for deposition of nanostructured thin films</a><br>
Continuities
S - Specificky vyzkum na vysokych skolach<br>I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2014
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
WDS 2014 - Proceedings of Contributed Papers - Physics
ISBN
978-80-7378-276-4
ISSN
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e-ISSN
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Number of pages
5
Pages from-to
275-279
Publisher name
Matfyzpress
Place of publication
Praha
Event location
Praha
Event date
Jun 3, 2014
Type of event by nationality
EUR - Evropská akce
UT code for WoS article
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