Floating Harmonic Probe Measurements in the Low-Temperature Plasma Jet Deposition System

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F17%3A10372267" target="_blank" >RIV/00216208:11320/17:10372267 - isvavai.cz</a>
Result on the web
<a href="https://www.mff.cuni.cz/veda/konference/wds/proc/pdf17/WDS17_12_f2_Zanaska.pdf" target="_blank" >https://www.mff.cuni.cz/veda/konference/wds/proc/pdf17/WDS17_12_f2_Zanaska.pdf</a>
DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Floating Harmonic Probe Measurements in the Low-Temperature Plasma Jet Deposition System
Original language description
The floating harmonic probe (FHP) is a relatively new plasma diagnostic method, which was proposed to be used in conditions when insulating films are being deposited on the probe and classical Langmuir probe method fails. An AC voltage is applied to the FHP and from the measured AC probe current waveforms the electron temperature and the ion density can be obtained. In this contribution we present the comparison of the FHP with the classical Langmuir probe and results obtained during deposition of insulating iron oxide thin film.
Czech name
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Czech description
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Project
<a href="/en/project/GA15-00863S" target="_blank" >GA15-00863S: A study of impulse plasmatic systems for deposition of thin layers with applications in photonics</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2017
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
WDS'17 Proceedings of Contributed Papers — Physics
ISBN
978-80-7378-356-3
ISSN
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e-ISSN
neuvedeno
Number of pages
6
Pages from-to
82-87
Publisher name
Matfyzpress
Place of publication
Praha
Event location
Prague, Czech Republic
Event date
Jun 6, 2017
Type of event by nationality
EUR - Evropská akce
UT code for WoS article
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