Floating harmonic probe for diagnostic of pulsed discharges
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F19%3A00512093" target="_blank" >RIV/68378271:_____/19:00512093 - isvavai.cz</a>
Alternative codes found
RIV/00216208:11320/19:10389488
Result on the web
<a href="https://doi.org/10.1016/j.surfcoat.2018.10.039" target="_blank" >https://doi.org/10.1016/j.surfcoat.2018.10.039</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.surfcoat.2018.10.039" target="_blank" >10.1016/j.surfcoat.2018.10.039</a>
Alternative languages
Result language
angličtina
Original language name
Floating harmonic probe for diagnostic of pulsed discharges
Original language description
The floating harmonic probe (FHP) is a relatively new plasma diagnostic method for electron temperature and positive ion density measurement, which can be used in conditions when insulating films are being deposited on the probe and, consequently, the classical Langmuir probe method fails. Recently an extension of this method called PDHAM – phase delay harmonic analysis method - was proposed that is applicable also to pulsed discharges. In this contribution, we study the possible limitations of this new method and present the comparison of the plasma density and the electron temperature determined by PDHAM with that obtained by the time-resolved Langmuir probe in a pulsed planar magnetron discharge. In addition, we present the double probe technique for applications in pulsed plasmas and we compare its results with those of a single FHP. The experiments were performed in argon at pressures several Pa in a non-reactive regime, when no insulating film was deposited on the probes.n
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10305 - Fluids and plasma physics (including surface physics)
Result continuities
Project
<a href="/en/project/EF16_019%2F0000760" target="_blank" >EF16_019/0000760: Solid State Physics for 21st century</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2019
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Surface and Coatings Technology
ISSN
0257-8972
e-ISSN
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Volume of the periodical
357
Issue of the periodical within the volume
Jan
Country of publishing house
CH - SWITZERLAND
Number of pages
7
Pages from-to
879-885
UT code for WoS article
000455691100110
EID of the result in the Scopus database
2-s2.0-85056200445