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Floating harmonic probe for diagnostic of pulsed discharges

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F19%3A00512093" target="_blank" >RIV/68378271:_____/19:00512093 - isvavai.cz</a>

  • Alternative codes found

    RIV/00216208:11320/19:10389488

  • Result on the web

    <a href="https://doi.org/10.1016/j.surfcoat.2018.10.039" target="_blank" >https://doi.org/10.1016/j.surfcoat.2018.10.039</a>

  • DOI - Digital Object Identifier

    <a href="http://dx.doi.org/10.1016/j.surfcoat.2018.10.039" target="_blank" >10.1016/j.surfcoat.2018.10.039</a>

Alternative languages

  • Result language

    angličtina

  • Original language name

    Floating harmonic probe for diagnostic of pulsed discharges

  • Original language description

    The floating harmonic probe (FHP) is a relatively new plasma diagnostic method for electron temperature and positive ion density measurement, which can be used in conditions when insulating films are being deposited on the probe and, consequently, the classical Langmuir probe method fails. Recently an extension of this method called PDHAM – phase delay harmonic analysis method - was proposed that is applicable also to pulsed discharges. In this contribution, we study the possible limitations of this new method and present the comparison of the plasma density and the electron temperature determined by PDHAM with that obtained by the time-resolved Langmuir probe in a pulsed planar magnetron discharge. In addition, we present the double probe technique for applications in pulsed plasmas and we compare its results with those of a single FHP. The experiments were performed in argon at pressures several Pa in a non-reactive regime, when no insulating film was deposited on the probes.n

  • Czech name

  • Czech description

Classification

  • Type

    J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database

  • CEP classification

  • OECD FORD branch

    10305 - Fluids and plasma physics (including surface physics)

Result continuities

  • Project

    <a href="/en/project/EF16_019%2F0000760" target="_blank" >EF16_019/0000760: Solid State Physics for 21st century</a><br>

  • Continuities

    P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Others

  • Publication year

    2019

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Name of the periodical

    Surface and Coatings Technology

  • ISSN

    0257-8972

  • e-ISSN

  • Volume of the periodical

    357

  • Issue of the periodical within the volume

    Jan

  • Country of publishing house

    CH - SWITZERLAND

  • Number of pages

    7

  • Pages from-to

    879-885

  • UT code for WoS article

    000455691100110

  • EID of the result in the Scopus database

    2-s2.0-85056200445