Floating Harmonic Probe for Diagnostics of Pulsed Discharges

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F18%3A10389733" target="_blank" >RIV/00216208:11320/18:10389733 - isvavai.cz</a>
Result on the web
<a href="https://www.mff.cuni.cz/veda/konference/wds/proc/pdf18/WDS18_23_f2_Zanaska.pdf" target="_blank" >https://www.mff.cuni.cz/veda/konference/wds/proc/pdf18/WDS18_23_f2_Zanaska.pdf</a>
DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Floating Harmonic Probe for Diagnostics of Pulsed Discharges
Original language description
The floating harmonic probe (FHP) is a relatively new plasma diagnostic method for electron temperature and positive ion density measurement, which was proposed to be used in conditions when insulating films are being deposited on the probe and, consequently, classical Langmuir probe method fails. Recently an extension of this method called PDHAM - phase delay harmonic analysis method - applicable also to pulsed discharges was proposed. In this contribution we study the possible limitations of this new method and present the comparison of the PDHAM with the time-resolved Langmuir probe in pulsed planar magnetron discharge in nonreactive regime, when no insulating film was deposited on the probe.
Czech name
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Czech description
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Project
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Continuities
S - Specificky vyzkum na vysokych skolach<br>I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year
2018
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
WDS'18 Proceedings of Contributed Papers — Physics
ISBN
978-80-7378-374-7
ISSN
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e-ISSN
neuvedeno
Number of pages
6
Pages from-to
150-155
Publisher name
Matfyzpress
Place of publication
Praha
Event location
Prague, Czech Republic
Event date
Jun 5, 2018
Type of event by nationality
EUR - Evropská akce
UT code for WoS article
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