Floating harmonic probe measurements in the low-temperature plasma jet deposition system

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F18%3A10378879" target="_blank" >RIV/00216208:11320/18:10378879 - isvavai.cz</a>
Alternative codes found
RIV/68378271:_____/18:00489658
Result on the web
<a href="https://doi.org/10.1088/1361-6463/aa9d3b" target="_blank" >https://doi.org/10.1088/1361-6463/aa9d3b</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1088/1361-6463/aa9d3b" target="_blank" >10.1088/1361-6463/aa9d3b</a>

Result language
angličtina
Original language name
Floating harmonic probe measurements in the low-temperature plasma jet deposition system
Original language description
The floating harmonic probe is a relatively new plasma diagnostic method, which was proposed for applications at conditions when insulating films are deposited on the probe and, consequently, the classical Langmuir probe method fails. In the floating harmonic probe method a purely sinusoidal AC voltage is applied to the probe constructed in a standard manner via a capacitor. From the spectral components of the measured AC probe current waveforms, the electron temperature and the positive ion density can be obtained. In this contribution we present the comparison of the electron temperature and density acquired by the floating harmonic probe method with those obtained by the classical Langmuir probe. The experiments are performed in the flowing DC discharge in argon. In addition, the results from the floating harmonic probe method obtained during deposition of an insulating iron oxide thin film are shown. All the data is complemented by the qualitative discussion.
Czech name
—
Czech description
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Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
—
OECD FORD branch
10305 - Fluids and plasma physics (including surface physics)

Project
<a href="/en/project/GA15-00863S" target="_blank" >GA15-00863S: A study of impulse plasmatic systems for deposition of thin layers with applications in photonics</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2018
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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