Analytical Evaluation of Plasma Parameters by Optical Emission Spectroscopy in Low-Pressure Hollow Cathode Plasma Jet and Planar Magnetron System by DC and Pulsed DC Excitation Sourc

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F21%3A10440101" target="_blank" >RIV/00216208:11320/21:10440101 - isvavai.cz</a>

Result on the web

<a href="https://www.mff.cuni.cz/veda/konference/wds/proc/pdf21/WDS21_16_f2_Mishra.pdf" target="_blank" >https://www.mff.cuni.cz/veda/konference/wds/proc/pdf21/WDS21_16_f2_Mishra.pdf</a>

DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Analytical Evaluation of Plasma Parameters by Optical Emission Spectroscopy in Low-Pressure Hollow Cathode Plasma Jet and Planar Magnetron System by DC and Pulsed DC Excitation Sourc

Original language description

Optical emission spectroscopy (OES) unified with the models of plasma light emission becomes a non-intrusive and versatile method for plasma parameters determination. Each spectral line in emission spectroscopy corresponds to an optical transition between two quantum levels of atom/molecule. The number density of gas species in the upper state determines the spectral line intensity. The spectral line intensities regulate densities of species in various states. With the utilization of the modified Boltzmann equation and line intensity ratios, one can calculate the electron temperature (Te) and electron density (ne). The analytical evaluation of plasma parameters in the low-pressure regime for hollow cathode plasma jet (HC) and planar magnetron system (PMS) in presence of DC and pulsed-DC excitation source was performed successfully. The effect of various processing parameters like power, working pressure on plasma parameters have been investigated in presence of argon (Ar) gas atmosphere.

Czech name

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Czech description

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Type

D - Article in proceedings

CEP classification

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OECD FORD branch

10305 - Fluids and plasma physics (including surface physics)

Project

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Continuities

S - Specificky vyzkum na vysokych skolach<br>I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year

2021

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection

WDS&apos;21 Proceedings of Contributed Papers — Physics

ISBN

978-80-7378-455-3

ISSN

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e-ISSN

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Number of pages

8

Pages from-to

112-119

Publisher name

Matfyzpress

Place of publication

Praha

Event location

Praha/ZOOM

Event date

Jun 15, 2021

Type of event by nationality

EUR - Evropská akce

UT code for WoS article

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