Optical emission spectroscopy study of plasma parameters in low-pressure hollow cathode plasma jet and planar magnetron powered by DC and pulsed DC supply
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F22%3A10446945" target="_blank" >RIV/00216208:11320/22:10446945 - isvavai.cz</a>
Result on the web
<a href="https://verso.is.cuni.cz/pub/verso.fpl?fname=obd_publikace_handle&handle=0qXer7ajFf" target="_blank" >https://verso.is.cuni.cz/pub/verso.fpl?fname=obd_publikace_handle&handle=0qXer7ajFf</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.vacuum.2022.111413" target="_blank" >10.1016/j.vacuum.2022.111413</a>
Alternative languages
Result language
angličtina
Original language name
Optical emission spectroscopy study of plasma parameters in low-pressure hollow cathode plasma jet and planar magnetron powered by DC and pulsed DC supply
Original language description
Optical emission spectroscopy (OES) has become a non-intrusive and versatile method for plasma parameters determination. Each spectral line in emission spectroscopy corresponds to an optical transition between two quantum levels of atom/molecule. The spectral line intensities are controlled by densities of species in various upper states. We calculated the electron temperature (T-e) and electron density (n(e)) in low-pressure discharge systems based on the modified Boltzmann equation and line intensity ratios. We have evaluated the mentioned plasma parameters in the low-pressure hollow cathode plasma jet (HC) and planar magnetron cathode system (PM) in the continuous DC and the pulsed-DC regime. We present the dependences of the electron temperature (T-e) and electron density (n(e)) on the applied power and the argon flow rate in the mentioned two systems together with a qualitative discussion of the obtained results.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10305 - Fluids and plasma physics (including surface physics)
Result continuities
Project
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Continuities
S - Specificky vyzkum na vysokych skolach<br>I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2022
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Vacuum
ISSN
0042-207X
e-ISSN
1879-2715
Volume of the periodical
205
Issue of the periodical within the volume
Nov
Country of publishing house
GB - UNITED KINGDOM
Number of pages
8
Pages from-to
111413
UT code for WoS article
000848163400007
EID of the result in the Scopus database
2-s2.0-85136147105