Plasma Diagnostics of Titanium Nitride for Plasmonic Study Generated Through Hollow Cathode Plasma Jet

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F22%3A10457035" target="_blank" >RIV/00216208:11320/22:10457035 - isvavai.cz</a>
Result on the web
<a href="https://www.mff.cuni.cz/veda/konference/wds/proc/pdf22/WDS22_15_f2_Turek.pdf" target="_blank" >https://www.mff.cuni.cz/veda/konference/wds/proc/pdf22/WDS22_15_f2_Turek.pdf</a>
DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Plasma Diagnostics of Titanium Nitride for Plasmonic Study Generated Through Hollow Cathode Plasma Jet
Original language description
This work demonstrate plasma diagnostics study of TiN plasma generated through hollow cathode plasma jet in DC discharge by changing power and changing flow rate keeping constant pressure of 30 Pa in both cases. Plasma parameters like electron temperature (Te) or electron density (ne) give vital insights knowledge about film growth and effect of different processing parameters on film deposition. The Langmuir probe was deployed in our discharge chamber for acquiring information about plasma parameters.
Czech name
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Czech description
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Project
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Continuities
S - Specificky vyzkum na vysokych skolach<br>I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year
2022
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
WDS'22 Proceedings of Contributed Papers — Physics
ISBN
978-80-7378-477-5
ISSN
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e-ISSN
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Number of pages
6
Pages from-to
107-112
Publisher name
Matfyzpress
Place of publication
Praha
Event location
Praha
Event date
Jun 7, 2022
Type of event by nationality
EUR - Evropská akce
UT code for WoS article
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