Optical characterization of thin films with randomly rough boundaries using the photovoltage method

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F00%3A00002318" target="_blank" >RIV/00216224:14310/00:00002318 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Optical characterization of thin films with randomly rough boundaries using the photovoltage method

Original language description

In this paper the determination of the values of the optical parameters of thin films exhibiting randomly rough boundaries using a photovoltage method is presented. This photovoltage method is based on measuring the radiant flux passing through the filmstudied. Theoretical formulae needed for applying the method are derived. The practical utilization of the method is illustrated by means of characterizing a rough SiO2-film on a silicon single crystal. A correctness of the results achieved for this filmis confirmed by values of the optical parameters of the SiO2-film determined by a combined method of spectroscopic ellipsometry and spectroscopic reflectometry. It will also be shown that the photovoltage method enables us to determine the values of theoptical parameters of the rough thin films with the randomly rough boundaries in a simpler way than the standard optical methods.

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BM - Solid-state physics and magnetism

OECD FORD branch

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Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2000

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Thin Solid Films

ISSN

0040-6090

e-ISSN

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Volume of the periodical

366

Issue of the periodical within the volume

1

Country of publishing house

GB - UNITED KINGDOM

Number of pages

8

Pages from-to

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UT code for WoS article

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EID of the result in the Scopus database

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