Optical emission spectroscopy of surfatron generated plasma in Ar + O2 and N2 + O2 mixtures
Result description
In this study surfatron-generated plasma in Ar + O2 and N2 + O2 gas mixtures was studied by means of optical emission spectroscopy. The surfatron powered by a microwave magnetron generator working at frequency 2.45 GHz in the output power range 0 300 W created plasma from the flowing gas in a quartz tube. The total gas flow rate was kept constant at 600 sccm but the ratio of individual gas flows was varied. Paper discusses results of optical emission spectroscopy: axial variations of radiation of various neutral species in the plasma as well as axial development of rotational and vibrational temperature determined from OH and N2 emission.
Keywords
The result's identifiers
Result code in IS VaVaI
Alternative codes found
RIV/00216208:11320/05:00001246
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Optical emission spectroscopy of surfatron generated plasma in Ar + O2 and N2 + O2 mixtures
Original language description
In this study surfatron-generated plasma in Ar + O2 and N2 + O2 gas mixtures was studied by means of optical emission spectroscopy. The surfatron powered by a microwave magnetron generator working at frequency 2.45 GHz in the output power range 0 300 W created plasma from the flowing gas in a quartz tube. The total gas flow rate was kept constant at 600 sccm but the ratio of individual gas flows was varied. Paper discusses results of optical emission spectroscopy: axial variations of radiation of various neutral species in the plasma as well as axial development of rotational and vibrational temperature determined from OH and N2 emission.
Czech name
Optická emisní spektroskopie surfatronem buzeného plazmatu ve směsích Ar + O2 a N2 + O2
Czech description
Práce shrnuje výsledky optické emisní spektroskopie surfatronem buzeného plazmatu ve směsích Ar+O2 a N2+O2. Jsou prezentována měření axiálních závislostí záření různých zdrojů v plazmatu, stejně jako vývoj a stabilní hodnoty parametrů plazmatu.
Classification
Type
D - Article in proceedings
CEP classification
BL - Plasma physics and discharge through gases
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2005
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Proceedings of ICPIG XXVII
ISBN
90-386-2231-7
ISSN
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e-ISSN
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Number of pages
4
Pages from-to
06-178
Publisher name
Technical University Eindhoven
Place of publication
Eindhoven, The Netherlands
Event location
Veldhoven, The Netherlands
Event date
Jun 18, 2005
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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Basic information
Result type
D - Article in proceedings
CEP
BL - Plasma physics and discharge through gases
Year of implementation
2005