Surfatron Plasma Source of Jet Type - Construction and Diagnostics

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F05%3A00021650" target="_blank" >RIV/00216224:14310/05:00021650 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Surfatron Plasma Source of Jet Type - Construction and Diagnostics
Original language description
A plasma source based on surfatron was developed and subjected to detailed diagnostics with the aim of future technological applications e.g. surface activation, biomedical application, plasma sterilisation etc. The surfatron powered by a microwave magnetron generator working at frequency 2.45 GHz in the output power range 0 - 300 W created plasma from the flowing gas in a quartz tube which is inserted into the surfatron body (resonator cavity). The total gas flow rate was kept constant at 600 sccm butthe ratio of individual gas components flow was varied. Mixtures of Ar (carrier gas) and N2 or O2 (reactive gases) are investigated mainly. The paper is focused on plasma diagnostics made by means of probe measurement (single and double probe technique)and optical emission spectroscopy. Basic plasma parameters are discussed as radial, axial, power and pressure dependences.
Czech name
Surfatronový výboj tryskového provedení - konstrukce a diagnostika
Czech description
Byl vyvinut plazmový zdroj na bázi surfatronu. Plazmový zdroj byl podroben detailnímu studiu s účelem ho využít k úpravě povrchů, biomedicinským aplikacím apod.

Publication year
2005
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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