Correlation of thermal stability of the mechanical and optical properties of diamond-like carbon films

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F07%3A00020890" target="_blank" >RIV/00216224:14310/07:00020890 - isvavai.cz</a>

Alternative codes found

RIV/00216305:26210/07:PU68172

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Correlation of thermal stability of the mechanical and optical properties of diamond-like carbon films

Original language description

The aim of the present contribution is the study of the influence of the annealing on the mechanical and optical properties of the plasma deposited diamond-like carbon (DLC) films. The DLC films were prepared for different values of hydrogen content fromthe mixture of methane and hydrogen in capacitively coupled PECVD reactor. Thermal stability of the films was investigated using sample annealing. The optical properties of the as deposited and annealed DLC films were studied ex situ using variable angle spectroscopic ellipsometry and spectroscopic reflectometry applied within the near-UV, visible and near-IR regions. For optical constants our dispersion model based on parameterization of the densities of electronic states was used. The dependence of the hardness and the elastic modulus on the hydrogen content in the deposition feed was determined using depth sensing indentation technique. It was found that with increasing temperature the sp3-to-sp2 ratio, atomic fraction of hydrogen,

Czech name

Korelace tepelné stability mechanických a optických vlasností diamantu podobných uhlíkových vrstev

Czech description

Cíl prezentovaného příspěvku

Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BM - Solid-state physics and magnetism

OECD FORD branch

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Project

<a href="/en/project/GA106%2F05%2F0274" target="_blank" >GA106/05/0274: Multiscale approach to relationships between mechanical and microstructural characteristics of materials</a><br>

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2007

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Diamond and Related Materials

ISSN

0925-9635

e-ISSN

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Volume of the periodical

16

Issue of the periodical within the volume

4-7

Country of publishing house

US - UNITED STATES

Number of pages

5

Pages from-to

1331-1335

UT code for WoS article

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EID of the result in the Scopus database

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