Optical and mechanical characterization of ultrananocrystalline diamond films prepared in dual frequency discharges
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F10%3A00040570" target="_blank" >RIV/00216224:14310/10:00040570 - isvavai.cz</a>
Alternative codes found
RIV/49777513:23210/10:00503819
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Optical and mechanical characterization of ultrananocrystalline diamond films prepared in dual frequency discharges
Original language description
Ultrananocrystalline diamond (UNCD) films were deposited directly on polished c-Si substrates in microwave discharge (2.45 GHz) combined with rf capacitive plasma (13.56 MHz) ignited at the substrate electrode. The rf discharge induced a dc self-bias accelerating ions towards the growing film during the whole deposition process. The substrate was either preheated in hydrogen discharge to the deposition temperature of 900 C or the deposition of intermediate layer started at about 200 C and reached 900 Cin the 5th minute. The latter procedure resulted in the deposition of coating with the hardness of 70 GPa and very good fracture toughness. The analysis of optical measurement in UV-IR range confirmed the presence of 250 nm thick intermediate layer containing DLC and SiC materials.
Czech name
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Czech description
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Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BL - Plasma physics and discharge through gases
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2010
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Surface & coatings technology
ISSN
0257-8972
e-ISSN
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Volume of the periodical
204
Issue of the periodical within the volume
12-13
Country of publishing house
NL - THE KINGDOM OF THE NETHERLANDS
Number of pages
5
Pages from-to
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UT code for WoS article
000275692100026
EID of the result in the Scopus database
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