Higher harmonic frequencies in capacitive discharges

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F10%3A00045010" target="_blank" >RIV/00216224:14310/10:00045010 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Higher harmonic frequencies in capacitive discharges
Original language description
The contribution deals with higher harmonic frequencies that are produced in capacitively coupled discharges due to the nonlinearity of sheaths. Higher harmonics are strong especially at low pressure and they can have a significant influence on plasma. Moreover, they are a tool for plasma diagnostics and monitoring. In this work, dependence of amplitudes of higher harmonics on plasma parameters is studied experimentally. Decrease of pressure causes resonant amplification of harmonics probably related tothe series plasma-sheath resonance. Similarly, decrease of electron concentration lead to a resonant amplification. Further, effects of RF power and state of the matching unit were compared. Finally, it was shown that harmonics sensitively react on presence of a deposited film which makes them suitable for monitoring purposes.
Czech name
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Czech description
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Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year
2010
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
Bulletin of the American Physical Society 55 (2010), CTP142
ISBN
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ISSN
0003-0503
e-ISSN
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Number of pages
5
Pages from-to
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Publisher name
CNRS
Place of publication
Paříž
Event location
Paříž
Event date
Jan 1, 2010
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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