Calculation of higher harmonic frequencies generated in capacitively coupled discharges
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F13%3A00068905" target="_blank" >RIV/00216224:14310/13:00068905 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Calculation of higher harmonic frequencies generated in capacitively coupled discharges
Original language description
Capacitively coupled discharge was modeled as a series combination of two nonlinear sheaths, a bulk plasma and a RF generator. This equivalent circuit was used for calculation of electric characteristics of capacitively coupled discharges including the spontaneous generation of higher harmonic frequencies of discharge current and sheath voltages. The calculation was realized both for single- and for double-frequency discharges. Mutual influences of discharge asymmetry, higher harmonic frequencies and amplitude of discharge voltage were studied. Various effects of plasma resonances and coupling of higher harmonic frequencies were observed and behaviour of higher harmonic frequencies in collisional plasma at high pressure was predicted.
Czech name
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Czech description
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Classification
Type
O - Miscellaneous
CEP classification
BL - Plasma physics and discharge through gases
OECD FORD branch
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Result continuities
Project
<a href="/en/project/ED2.1.00%2F03.0086" target="_blank" >ED2.1.00/03.0086: Regional R&D center for low-cost plasma and nanotechnology surface modifications</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2013
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů