Modelling of electric characteristics of capacitively coupled discharges including nonlinear effects of sheaths
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F13%3A00068904" target="_blank" >RIV/00216224:14310/13:00068904 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1088/0963-0252/22/4/045016" target="_blank" >http://dx.doi.org/10.1088/0963-0252/22/4/045016</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1088/0963-0252/22/4/045016" target="_blank" >10.1088/0963-0252/22/4/045016</a>
Alternative languages
Result language
angličtina
Original language name
Modelling of electric characteristics of capacitively coupled discharges including nonlinear effects of sheaths
Original language description
Electric characteristics of capacitively coupled discharges were calculated, including their nonlinear behaviour and generation of higher harmonic frequencies of discharge current and voltage. The discharge was modelled as a series combination of the bulk plasma, two nonlinear sheaths and a radio frequency generator. Comparison of the results of the model with an experiment is discussed. The model was used for studying the waveforms of discharge current and sheath voltages and generation of higher harmonic frequencies at a wide range of discharge parameters. Coupling of higher harmonic frequencies, discharge asymmetry and discharge voltage was demonstrated. The effects of plasma?sheath resonance and other phenomena on the discharge behaviour were shown.
Czech name
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Czech description
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Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BL - Plasma physics and discharge through gases
OECD FORD branch
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Result continuities
Project
<a href="/en/project/ED2.1.00%2F03.0086" target="_blank" >ED2.1.00/03.0086: Regional R&D center for low-cost plasma and nanotechnology surface modifications</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2013
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Plasma Sources Sci. Technol.
ISSN
0963-0252
e-ISSN
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Volume of the periodical
22
Issue of the periodical within the volume
červenec
Country of publishing house
GB - UNITED KINGDOM
Number of pages
10
Pages from-to
045016
UT code for WoS article
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EID of the result in the Scopus database
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