Hybrid PVD-PECVD Process for Synthesis of Me/C Nanocomposite Coatings
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F12%3A00057712" target="_blank" >RIV/00216224:14310/12:00057712 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Hybrid PVD-PECVD Process for Synthesis of Me/C Nanocomposite Coatings
Original language description
Hybrid PVD-PECVD process of titanium sputtering in argon and acetylene has been used for deposition of nanocomposite material consisting of nanocrystallites of titanium carbide embedded in hydrogenated carbon matrix. nc-TiC/a-C:H layers showed promisingcombination of properties such as high hardness and Young?s modulus with low friction and wear making it an industrially attractive material for protective coatings and tribological applications. Hybrid PVD-PECVD process that combines aspects of both conventional techniques: sputtering of titanium target (PVD) and acetylene as a source of carbon for polymerization (PECVD) was studied. The aim of this contribution is to describe and understand elementary processes influencing the hybrid PVD-PECVD process. We report a non-monotonous evolution of cathode voltage and current, total pressure and spectral line intensities on acetylene supply flow. We propose an explanation of non-monotonous evolutions through the analysis of the target state.
Czech name
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Czech description
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Classification
Type
O - Miscellaneous
CEP classification
BL - Plasma physics and discharge through gases
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2012
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů