Non-monotonous evolution of hybrid PVD ? PECVD process characteristics on hydrocarbon supply
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F13%3A00066489" target="_blank" >RIV/00216224:14310/13:00066489 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1016/j.surfcoat.2013.05.014" target="_blank" >http://dx.doi.org/10.1016/j.surfcoat.2013.05.014</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.surfcoat.2013.05.014" target="_blank" >10.1016/j.surfcoat.2013.05.014</a>
Alternative languages
Result language
angličtina
Original language name
Non-monotonous evolution of hybrid PVD ? PECVD process characteristics on hydrocarbon supply
Original language description
Hybrid PVD ? PECVD process of titanium sputtering in argon and acetylene atmosphere combines aspects of both conventional techniques: sputtering of titanium target (PVD) and acetylene as a source of carbon (PECVD). This process can be used for preparation of metal carbon nanocomposites (MeC/C(:H)) or DLC layers doped with metal (DLC:Me). The aim of this paper is to describe and understand elementary processes in fl uencing the hybrid PVD ? PECVD process. A non-monotonous dependence of cathode voltage and current, total pressure and spectral line intensities on acetylene supply fl ow is reported. Explanation of non- monotonous evolutions through the analysis of the target state correlating the process characteristics with properties of coatings preparedby this process is proposed.
Czech name
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Czech description
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Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BL - Plasma physics and discharge through gases
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2013
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Surface & coatings technology
ISSN
0257-8972
e-ISSN
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Volume of the periodical
2013
Issue of the periodical within the volume
232
Country of publishing house
CH - SWITZERLAND
Number of pages
7
Pages from-to
283-289
UT code for WoS article
000327691300037
EID of the result in the Scopus database
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