Plasma cleaning and activation of silicon surface in Dielectric Coplanar Surface Barrier Discharge

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F13%3A00074780" target="_blank" >RIV/00216224:14310/13:00074780 - isvavai.cz</a>

Result on the web

<a href="http://dx.doi.org/10.1016/j.surfcoat.2013.10.008" target="_blank" >http://dx.doi.org/10.1016/j.surfcoat.2013.10.008</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.surfcoat.2013.10.008" target="_blank" >10.1016/j.surfcoat.2013.10.008</a>

Result language

angličtina

Original language name

Plasma cleaning and activation of silicon surface in Dielectric Coplanar Surface Barrier Discharge

Original language description

Surface of crystalline silicon (c-Si) wafers was treated in dielectric barrier discharge and the cleaning effect, wettability and adhesion of gold nanoparticles were investigated. Treatment of c-Si was realised in air plasma at atmospheric pressure in Diffuse Coplanar Surface Barrier Discharge (DCSBD). Plasma cleaning and gold nanoparticles adhesion were investigated by means of Laser Desorption Ionisation Time Of Flight Mass Spectrometry (LDI TOF MS) and X-ray photoelectron spectroscopy (XPS). Wettability and surface morphology were studied by contact angle measurement and atomic force microscopy, respectively. By laser desorption in positive ion mode, Cn+ and Na+, K+, etc. ions were detected on the industrially cleaned surface of silicon wafers. After plasma treatment the substantial decrease of such ions was observed. Plasma treatment of the surface increased also its hydrophilicity and adsorption of gold nanoparticles on the Si surface significantly increased after 5 sec cleaning i

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

CB - Analytical chemistry, separation

OECD FORD branch

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Project

<a href="/en/project/EE2.3.30.0009" target="_blank" >EE2.3.30.0009: Employment of Newly Graduated Doctors of Science for Scientific Excellence</a><br>

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2013

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Surface & coatings technology

ISSN

0257-8972

e-ISSN

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Volume of the periodical

236

Issue of the periodical within the volume

236

Country of publishing house

CH - SWITZERLAND

Number of pages

6

Pages from-to

326-331

UT code for WoS article

000329884300046

EID of the result in the Scopus database

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