Principles and practice of an automatic process control for the deposition of hard nc-TiC/a-C:H coatings by hybrid PVD-PECVD under industrial conditions

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F16%3A00088074" target="_blank" >RIV/00216224:14310/16:00088074 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1016/j.surfcoat.2016.06.061" target="_blank" >http://dx.doi.org/10.1016/j.surfcoat.2016.06.061</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.surfcoat.2016.06.061" target="_blank" >10.1016/j.surfcoat.2016.06.061</a>

Result language
angličtina
Original language name
Principles and practice of an automatic process control for the deposition of hard nc-TiC/a-C:H coatings by hybrid PVD-PECVD under industrial conditions
Original language description
A study of a hybrid PVD-PECVD process of sputtering a titanium target in an argon/acetylene gas mixture was performed. This process was used for the deposition of nanocomposite coatings consisting of titanium carbide grains embedded in an amorphous hydrogenated carbon matrix (nc-TiC/a-C:H). The study was performed under industrial conditions employing a large-scale deposition device with a cylindrical sputtering cathode. When the acetylene supply was gradually increased, a discharge voltage drop and total pressure saturation simultaneously occurred at a certain acetylene supply. The hardest coatings were found always to be deposited at the acetylene supply corresponding to these deposition conditions. However, the acetylene supply to detect the voltage drop and pressure saturation was determined to be dependent on the cathode thickness. A fully automatic procedure suitable for the preparation of hard nc-TiC/a-C:H coatings by the hybrid PVD-PECVD process was proposed in this paper.
Czech name
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Czech description
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Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BL - Plasma physics and discharge through gases
OECD FORD branch
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Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2016
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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