Impact of Sputtered Species Ionization on Hysteresis Curve Shape – Model and Experiment

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F17%3A00095254" target="_blank" >RIV/00216224:14310/17:00095254 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Impact of Sputtered Species Ionization on Hysteresis Curve Shape – Model and Experiment
Original language description
During the last decade the HiPIMS has shown great promise in the field of reactive thin film deposition. In the reactive HiPIMS (R-HiPIMS), the discharge power is delimited within short energetic pulses which, in addition to an enhanced ionization of the sputtered species, also leads to an enhanced dissociation of the reactive gas molecules resulting in an increasing gas reactivity with the surface, which is ultimately beneficial for the thin film formation.
Czech name
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Czech description
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Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>S - Specificky vyzkum na vysokych skolach<br>I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year
2017
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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